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公开(公告)号：US5952896A
公开(公告)日：1999-09-14
申请号：US954376
申请日：1997-10-20
申请人： Richard R. Mett , Robert D. Greenway , Gabriel Bilek , Ajey Joshi
发明人： Richard R. Mett , Robert D. Greenway , Gabriel Bilek , Ajey Joshi
CPC分类号： H03H7/38
摘要： A high efficiency radio frequency (RF) impedance matching network containing an "L-type" inductor-capacitor (LC) circuit where the capacitor is a variable capacitor coupled from an input port to ground and the inductor is a variable inductance inductor coupled from the input port to an output port. A blocking capacitor is provided between the inductor and the output port and a ceramic capacitor is coupled in parallel across the variable capacitor. The impedance match is tuned by physically adjusting tuning elements of both the inductor and capacitor. The variable inductor contains an improved inductor tuning element that optimizes current flow in the tuning elements and inductor. To further improve the efficiency of the matching network, the assembly uses an improved enclosure interior finish and various circuit optimization techniques that reduce contributions to match loop resistance.
摘要翻译： 包含“L型”电感器 - 电容器（LC）电路的高效率射频（RF）阻抗匹配网络，其中电容器是从输入端口耦合到地的可变电容器，并且电感器是从 输入端口到输出端口。 在电感器和输出端口之间提供隔离电容器，并且陶瓷电容器并联在可变电容器上。 通过物理调节电感和电容的调谐元件来调整阻抗匹配。 可变电感器包含改进的电感调谐元件，优化调谐元件和电感器中的电流。 为了进一步提高匹配网络的效率，该组件使用改进的外壳内部表面处理和各种电路优化技术，减少对匹配环路电阻的贡献。
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公开(公告)号：US06500299B1
公开(公告)日：2002-12-31
申请号：US09360351
申请日：1999-07-22
IPC分类号： H05H100
CPC分类号： H01J37/3244 , C23C16/4402 , C23C16/455
摘要： A gas feed-through 150 to provide gas to a plasma chamber 10, comprises a dielectric insert 155 having a passage 160 that allows the gas to be flowed therethrough, and a electrically conducting cup 165 around a portion of the passage. The electrically conducting cup 165 is shaped to reduce plasma formation in the gas feed-through 150.
摘要翻译： 用于向等离子体室10提供气体的气体馈通件150包括具有允许气体流过其中的通道160的电介质插入件155和围绕通道的一部分的导电杯165。 导电杯165成形为减少气体馈通150中的等离子体形成。
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公开(公告)号：US06605177B2
公开(公告)日：2003-08-12
申请号：US10256441
申请日：2002-09-27
IPC分类号： H01L21306
CPC分类号： H01J37/3244 , C23C16/4402 , C23C16/455
摘要： A substrate support comprises an electrode and a dielectric layer covering the electrode, the dielectric layer having a surface to receive a substrate. A gas feed-through provides a gas to the surface of the dielectric layer and comprises a conduit extending through one or more of the dielectric layer and electrode. A dielectric insert in the gas feed-through has a passage therein that allows the gas to be flowed therethrough. Two opposing electrically conducting cups are around the passage in the dielectric insert.
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4.发明申请Coil System and Method for Post-Exposure Dosimetry Using Electron Paramagnetic Resonance Spectroscopy 有权线圈系统和使用电子顺磁共振光谱的曝光后测量法的方法公开(公告)号：US20120112746A1
公开(公告)日：2012-05-10
申请号：US12868244
申请日：2010-08-25
IPC分类号： H01J49/00
CPC分类号： G01T1/02 , G01N24/10 , G01R33/3806 , G01R33/60
摘要： An apparatus and method for triaging patients according to radiation exposure operates by measuring electron paramagnetic resonance spectra of fingernails, toenails, and/or teeth. A coil structure allows in vivo measurement of tooth enamel or fingernail keratin with reduced coupling to underlying tissue.
摘要翻译： 根据辐射暴露对患者进行分类的装置和方法通过测量指甲，脚趾甲和/或牙齿的电子顺磁共振谱来进行。 线圈结构允许体内测量牙釉质或指甲角蛋白，减少与下面组织的结合。
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5.发明授权Cavity resonator for electron paramagnetic resonance spectroscopy having axially uniform field 有权用于具有轴向均匀场的电子顺磁共振光谱的腔谐振器公开(公告)号：US06828789B2
公开(公告)日：2004-12-07
申请号：US10200885
申请日：2002-07-23
IPC分类号： G01V300
摘要： A uniform-field resonator includes a central cavity section having a cross-section which is set to the cutoff frequency for a particular microwave propagation mode and a pair of end sections which enclose the cavity to form a resonator in which the field is substantially uniform along the entire length of the central cavity—regardless of its length. A number of end section design strategies and resulting structures are described for supporting the uniform-field mode of operation in the central cavity section.
摘要翻译： 均匀场谐振器包括中心空腔部分，其具有被设置为特定微波传播模式的截止频率的截面，以及包围空腔以形成谐振器的一对端部，其中场基本均匀 中心腔的整个长度 - 不管其长度。 描述了许多端部设计策略和结果，以支持中心腔部分中的均匀场操作模式。
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6.发明授权Coil system and method for post-exposure dosimetry using electron paramagnetic resonance spectroscopy 有权线圈系统和使用电子顺磁共振光谱的曝光后剂量测定方法公开(公告)号：US08674694B2
公开(公告)日：2014-03-18
申请号：US12868244
申请日：2010-08-25
IPC分类号： H01J49/00
CPC分类号： G01T1/02 , G01N24/10 , G01R33/3806 , G01R33/60
摘要： An apparatus and method for triaging patients according to radiation exposure operates by measuring electron paramagnetic resonance spectra of fingernails, toenails, and/or teeth. A coil structure allows in vivo measurement of tooth enamel or fingernail keratin with reduced coupling to underlying tissue.
摘要翻译： 根据辐射暴露对患者进行分类的装置和方法通过测量指甲，脚趾甲和/或牙齿的电子顺磁共振谱来进行。 线圈结构允许体内测量牙釉质或指甲角蛋白，减少与下面组织的结合。
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公开(公告)号：US06539621B1
公开(公告)日：2003-04-01
申请号：US09575813
申请日：2000-05-22
IPC分类号： H01B1320
CPC分类号： H01R24/40 , H01R13/44 , H01R2103/00 , Y10T29/49123 , Y10T29/49174 , Y10T29/49179
摘要： The present invention provides a safety guard for a type-N coaxial connector that prevents casual human contact with a conductive center pin of the coaxial cable. The safety guard is preferably made of a dielectric material and is generally tubular in shape. The safety guard is adapted to be installed on existing connectors in the field, or to be part of a connector assembly that is to be installed on a coaxial cable. Among the advantages of the present invention are substantial reduction in complexity over prior art interlock connector designs. The safety guard of the present invention is provided for a male connector only, thereby alleviating the need for modification of the mating female connector.
摘要翻译： 本发明提供了一种用于N型同轴连接器的安全保护装置，其防止与同轴电缆的导电中心销的偶然的人接触。 安全防护装置优选由电介质材料制成，并且通常为管状形状。 安全防护装置适用于现场的现有连接器上，也可安装在要安装在同轴电缆上的连接器组件的一部分。 与现有技术的互锁连接器设计相比，本发明的优点之一是显着降低了复杂度。 本发明的安全防护装置仅用于阳连接器，从而减轻对配合阴连接器的改进的需要。
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公开(公告)号：US6005376A
公开(公告)日：1999-12-21
申请号：US54576
申请日：1998-04-03
CPC分类号： G05F1/46
摘要： A DC power supply having a pair of "piggybacked" voltage supplies, where a reference voltage supply provides a reference voltage for a variable voltage supply and each voltage supply is coupled to a current sink. The power supply is capable of sourcing and sinking current through a single output terminal when supplying a positive or negative output voltage with respect to ground.
摘要翻译： 具有一对“搭载”电压源的直流电源，其中参考电压电源为可变电压源提供参考电压，并且每个电压源耦合到电流源。 当提供相对于地面的正或负输出电压时，电源能够通过单个输出端子来源和吸收电流。
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公开(公告)号：US06273736B1
公开(公告)日：2001-08-14
申请号：US08898178
申请日：1997-07-22
IPC分类号： H01R1344
CPC分类号： H01R24/40 , H01R13/44 , H01R2103/00 , Y10T29/49123 , Y10T29/49174 , Y10T29/49179
摘要： The present invention provides a safety guard for a type-N coaxial connector that prevents casual human contact with a conductive center pin of the coaxial cable. The safety guard is preferably made of a dielectric material and is generally tubular in shape. The safety guard is adapted to be installed on existing connectors in the field, or to be part of a connector assembly that is to be installed on a coaxial cable. Among the advantages of the present invention are substantial reduction in complexity over prior art interlock connector designs. The safety guard of the present invention is provided for a male connector only, thereby alleviating the need for modification of the mating female connector.
摘要翻译： 本发明提供了一种用于N型同轴连接器的安全保护装置，其防止与同轴电缆的导电中心销的偶然的人接触。 安全防护装置优选由电介质材料制成，并且通常为管状形状。 安全防护装置适用于现场的现有连接器上，也可安装在要安装在同轴电缆上的连接器组件的一部分。 与现有技术的互锁连接器设计相比，本发明的优点之一是显着降低了复杂度。 本发明的安全防护装置仅用于阳连接器，从而减轻对配合阴连接器的改进的需要。
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10.发明授权Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system 失效一种用于向半导体晶片处理系统内的静电卡盘供给夹持电压的方法和装置公开(公告)号：US06198616B1
公开(公告)日：2001-03-06
申请号：US09054575
申请日：1998-04-03
IPC分类号： H02N1300
CPC分类号： H01L21/6831 , H01L21/6833 , Y10T279/23
摘要： A method and apparatus for retaining a substrate, such as a semiconductor wafer, upon an electrostatic chuck within a semiconductor wafer processing system. Specifically, the invention contains high voltage, DC power supply that is capable of both sourcing and sinking current at any polarity of output voltage level. This power supply is coupled to at least one electrode of an electrostatic chuck. Consequently, the power supply can be used to dynamically control the chucking voltage in response to any indicia of optimal chucking including leakage current, wafer-to-chuck potential, backside gas leakage rate, and the like.
摘要翻译： 一种用于将衬底（例如半导体晶片）保持在半导体晶片处理系统内的静电卡盘上的方法和装置。 具体地，本发明包含能够在输出电压电平的任何极性下源电流和下降电流的高压直流电源。 该电源耦合到静电吸盘的至少一个电极。 因此，电源可以用于响应于包括泄漏电流，晶片到卡盘电位，背侧气体泄漏速率等的任何最佳卡盘的指示来动态地控制卡盘电压。
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