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1.发明授权Method for driving an actuator, actuator drive, and apparatus comprising an actuator 失效用于驱动致动器，致动器驱动器和包括致动器的装置的方法公开(公告)号：US07782720B2
公开(公告)日：2010-08-24
申请号：US10540687
申请日：2003-12-04
IPC分类号： G11B7/00
CPC分类号： G11B7/08517 , G11B7/08511 , G11B7/0941 , G11B7/0946 , G11B21/02
摘要： An actuator driver circuit includes a drive signal source and an electrical damping element having a negative resistance connected in series with the drive signal source. A controllable switch is provided for selectively switching the electrical damping element into or put of a signal path from a drive signal source output to a driver circuit output, in order to selectively change the electrical damping of an actuator. For example, the electrical damping of a radial actuator or a focus actuator of an optical disc drive is increased in case of loss of track or loss of focus.
摘要翻译： 致动器驱动电路包括驱动信号源和具有与驱动信号源串联连接的负电阻的电阻尼元件。 提供可控开关，用于选择性地将电阻尼元件切换到信号路径从驱动信号源输出到驱动器电路输出的放置，以选择性地改变致动器的电阻尼。 例如，在轨道丢失或焦点损失的情况下，增加了光盘驱动器的径向致动器或聚焦致动器的电阻尼。
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公开(公告)号：US07948122B2
公开(公告)日：2011-05-24
申请号：US11814003
申请日：2006-01-10
CPC分类号： G03F7/70758 , Y10S414/135
摘要： Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
摘要翻译： 特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。 第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。 对于第一部分的高精度定位，提供了干涉仪系统（731,730）。
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公开(公告)号：US20110158382A1
公开(公告)日：2011-06-30
申请号：US13060930
申请日：2009-08-31
申请人： Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
发明人： Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
CPC分类号： F16C32/0493 , A61B6/035 , A61B6/4435 , F16C32/0461 , F16C2300/14 , F16C2316/10 , F16C2380/26 , G01N2223/3303 , H02K7/09 , H02K41/03
摘要： The present invention relates to a rotating ring apparatus comprising: —a stationary ring (1), —a rotating ring (2) for rotation around a central region (3), —a rotation unit (4, 5) for radially bearing and rotating said rotating ring (2) with respect to the stationery ring (1), said rotation unit including a stationary induction element (4) mounted on said stationery ring (1) and a rotating induction element (5) mounted on said rotating ring (2), and —a controller (8) for controlling said rotation unit (4, 5) to rotate and levitate the rotating induction element (5).
摘要翻译： 旋转环设备技术领域本发明涉及一种旋转环设备，包括：固定环（1），围绕中心区域旋转的旋转环（2）， - 用于径向轴向旋转的旋转单元（4,5） 所述旋转环（2）相对于所述文具环（1），所述旋转单元包括安装在所述文具环（1）上的固定感应元件（4）和安装在所述旋转环（2）上的旋转感应元件（5） ）和 - 用于控制所述旋转单元（4,5）旋转并悬浮所述旋转感应元件（5）的控制器（8）。
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公开(公告)号：US06496093B2
公开(公告)日：2002-12-17
申请号：US09861937
申请日：2001-05-21
IPC分类号： H01F700
CPC分类号： G03F7/70758 , H02K41/031 , H02K2201/18
摘要： Positioning device with a first part and a second part which are movable relative to each other in at least one direction. Said first part comprises a carrier on which a system of magnets with N and Z magnets are arranged in an alternating manner and having a flux density B(x)=B(x+2&tgr;), &tgr; being the magnetic pole pitch. Said second part comprises an electric coil system with at least one coil block unit, each unit having k coil blocks with k]2, said coil blocks having conductors, all conductors belonging to the same coil block being oriented in the same direction and fed by a n-phase system with n]2. Seen in a direction perpendicular to the conductors, the flux varies according to Φ = sin π ( x + x 0 ) 2 τ . During the desired movement of the parts relative to each other, there is a small undesired up and down movement perpendicular to the desired movement. To avoid this undesired movement, the distance between the mass centers of the coil blocks belonging to a coil block unit, seen in a direction perpendicular to the conductors, is equal to τ k + p × τ , with p=2, 3 . . ..
摘要翻译： 具有第一部分和第二部分的定位装置可以在至少一个方向上相对于彼此移动。 所述第一部分包括载体，具有N和Z磁体的磁体系统以交替方式布置并具有通量密度B（x）= B（x + 2tau），τ为磁极间距。 所述第二部分包括具有至少一个线圈块单元的电线圈系统，每个单元具有k个具有k] 2的k个线圈块，所述线圈块具有导体，属于相同线圈块的所有导体沿相同方向定向并被馈送 具有n] 2的n相系统。 在与导体垂直的方向上，通量根据部件相对于彼此的期望运动而变化，垂直于期望的运动存在小的不希望的上下运动。 为了避免这种不期望的移动，属于线圈块单元的线圈块的质心位于与导体垂直的方向上的距离等于p = 2,3。 。 .. ..
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公开(公告)号：US09011001B2
公开(公告)日：2015-04-21
申请号：US13060930
申请日：2009-08-31
申请人： Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
发明人： Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
CPC分类号： F16C32/0493 , A61B6/035 , A61B6/4435 , F16C32/0461 , F16C2300/14 , F16C2316/10 , F16C2380/26 , G01N2223/3303 , H02K7/09 , H02K41/03
摘要： The present invention relates to a rotating ring apparatus comprising: —a stationary ring (1), —a rotating ring (2) for rotation around a central region (3), —a rotation unit (4, 5) for radially bearing and rotating said rotating ring (2) with respect to the stationery ring (1), said rotation unit including a stationary induction element (4) mounted on said stationery ring (1) and a rotating induction element (5) mounted on said rotating ring (2), and —a controller (8) for controlling said rotation unit (4, 5) to rotate and levitate the rotating induction element (5).
摘要翻译： 旋转环设备技术领域本发明涉及一种旋转环设备，包括：固定环（1），围绕中心区域旋转的旋转环（2）， - 用于径向轴向旋转的旋转单元（4,5） 所述旋转环（2）相对于所述文具环（1），所述旋转单元包括安装在所述文具环（1）上的固定感应元件（4）和安装在所述旋转环（2）上的旋转感应元件（5） ）和 - 用于控制所述旋转单元（4,5）旋转并悬浮所述旋转感应元件（5）的控制器（8）。
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6.发明授权Lithographic linear motor, lithographic apparatus, and device manufacturing method 有权光刻线性电机，光刻设备和器件制造方法公开(公告)号：US07095485B2
公开(公告)日：2006-08-22
申请号：US10797662
申请日：2004-03-11
CPC分类号： G03F7/70758 , H02K41/031 , H02K2201/18
摘要： A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks and an armature comprising three open coil sets. The linear motor may be used to drive a stage, such as, for example, a mask or wafer stage, in a lithographic apparatus.
摘要翻译： 具有高驱动力，高效率和低法向力的线性电动机包括两个相对的磁体轨道和包括三个开放线圈组的电枢。 线性电动机可以用于在光刻设备中驱动台，例如掩模或晶片台。
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公开(公告)号：US06661127B2
公开(公告)日：2003-12-09
申请号：US10028117
申请日：2001-12-21
申请人： Petrus Carolus Maria Frissen , Johan Cornelis Compter , Michael Josepha Mathijs Renkens , George Arie Jan De Fockert , Rob Jacobus Matheus Coolen
发明人： Petrus Carolus Maria Frissen , Johan Cornelis Compter , Michael Josepha Mathijs Renkens , George Arie Jan De Fockert , Rob Jacobus Matheus Coolen
IPC分类号： H02K4100
CPC分类号： H02K41/031 , H02K2201/18
摘要： Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) having a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) has an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field. The positioning device has a number of magnetically sensitive sensors (Hall sensors 45) giving a signal which depends on the local mutual positions of the permanent magnets of the first part relative to the electric coils of the second part in an area in which the parts overlap.
摘要翻译： 具有第一部分（1）的定位装置，所述第一部分（1）在X和Y方向上可相对于第二部分（2）移动，所述第一部分（1）具有载体（5），磁体系统（3） 分别排列成平行于X方向和Y方向的行（7）和列（8）的图案。 每行和列中的磁体以Halbach阵列布置，即，每行（7）中的每个连续磁体的磁性取向和每个列（8）逆时针旋转90°。 第二部分（2）具有电磁线圈系统（4），其具有两种类型的电线圈（C1，C2），一种类型的角偏移为+ 45°，另一种类型具有-45°相对于 X方向。 磁体配置导致非常强的磁场。 定位装置具有多个磁敏传感器（霍尔传感器45），该传感器（Hall传感器45）在第一部分的永磁体相对于第二部分的电线圈的局部相互位置取决于部件重叠的区域中的信号 。
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公开(公告)号：US20090243426A1
公开(公告)日：2009-10-01
申请号：US11721696
申请日：2005-12-12
IPC分类号： H02N1/08
CPC分类号： H02N1/004 , H01L21/6831
摘要： Electrostatic displacement devices (1) with high forces and high accelerations are provided by arranging the electrodes (31, 31a, 31b) such that an electric field is generated extending over an area equivalent to the surface area of the object (2) to be displaced. Preferably, higher voltages are applied to the electrodes (31a) in the edge region than to the electrodes (31b) in the middle region, to further increase the shear forces inducing the actual displacement.
摘要翻译： 通过布置电极（31,31a，31b）使得产生电场而延伸超过待移动物体（2）的表面积的区域上来提供具有高力和高加速度的静电位移装置（1） 。 优选地，在边缘区域中的电极（31a）上施加更高的电压，而不是中间区域中的电极（31b），以进一步增加引起实际位移的剪切力。
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公开(公告)号：US20080203828A1
公开(公告)日：2008-08-28
申请号：US11814003
申请日：2006-01-10
IPC分类号： H02K41/00
CPC分类号： G03F7/70758 , Y10S414/135
摘要： Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
摘要翻译： 特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。 第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。 对于第一部分的高精度定位，提供了干涉仪系统（731,730）。
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公开(公告)号：US06593697B1
公开(公告)日：2003-07-15
申请号：US09698766
申请日：2000-10-27
IPC分类号： H01J1346
CPC分类号： H01J29/96 , H01J2229/966
摘要： The invention relates to a resistor assembly for dividing an applied voltage into an intermediate voltage being below the applied anode voltage in a cathode ray tube. The resistor assembly comprises an insulating substrate and a resistive voltage divider including a first and a second resistive layer provided on the insulating substrate, and an additional resistive network with a first network terminal and a second network terminal. The additional resistive network is coupled in series with the first resistive layer. Furthermore, the additional resistive network comprises first and second resistive portions which are releasably coupled to the network terminals via bridge connections. According to the invention, the first and second resistive portions have substantially different resistance values for selecting a predetermined resistance value from a range of resistance values of the additional resistive network.
摘要翻译： 本发明涉及一种电阻器组件，其用于将施加的电压分解成在阴极射线管中施加的阳极电压以下的中间电压。 电阻器组件包括绝缘基板和包括设置在绝缘基板上的第一和第二电阻层的电阻分压器，以及具有第一网络终端和第二网络终端的附加电阻网络。 附加电阻网络与第一电阻层串联耦合。 此外，附加电阻网络包括第一和第二电阻部分，其通过桥连接可释放地耦合到网络终端。 根据本发明，第一和第二电阻部分具有基本上不同的电阻值，用于从附加电阻网络的电阻值的范围中选择预定的电阻值。
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