NONDESTRUCTIVE OPTICAL DETECTION OF TRACE UNDERCUT, WIDTH AND THICKNESS
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    发明申请
    NONDESTRUCTIVE OPTICAL DETECTION OF TRACE UNDERCUT, WIDTH AND THICKNESS 审中-公开
    非线性光学检测跟踪深度,宽度和厚度

    公开(公告)号:US20170059303A1

    公开(公告)日:2017-03-02

    申请号:US14840883

    申请日:2015-08-31

    IPC分类号: G01B11/06

    摘要: Some example forms relate to a method of nondestructively measuring a geometry of an electrical component on a substrate. The method includes directing light at the electrical component. The light is at an original intensity. The method further includes measuring light that is reflected off of the electrical component. The reflected light includes undiffracted light and diffracted light. The diffracted light is at a diffracted intensity. The method further includes determining a ratio of diffracted intensity to original intensity and utilizing the ratio to determine a geometry of the electrical component.

    摘要翻译: 一些示例形式涉及非破坏性地测量衬底上的电气部件的几何形状的方法。 该方法包括将光引导到电气部件。 光线处于原始强度。 该方法还包括测量从电气部件反射的光。 反射光包括未衍射的光和衍射光。 衍射光的衍射强度。 该方法还包括确定衍射强度与原始强度的比率,并利用该比率来确定电气部件的几何形状。