Field effect transistor and method of fabrication
    3.
    发明授权
    Field effect transistor and method of fabrication 有权
    场效应晶体管及其制造方法

    公开(公告)号:US06825506B2

    公开(公告)日:2004-11-30

    申请号:US10306640

    申请日:2002-11-27

    IPC分类号: H01L31072

    摘要: The present invention is a novel field effect transistor having a channel region formed from a narrow bandgap semiconductor film formed on an insulating substrate. A gate dielectric layer is formed on the narrow bandgap semiconductor film. A gate electrode is then formed on the gate dielectric. A pair of source/drain regions formed from a wide bandgap semiconductor film or a metal is formed on opposite sides of the gate electrode and adjacent to the low bandgap semiconductor film.

    摘要翻译: 本发明是一种新颖的场效应晶体管,其具有由形成在绝缘基板上的窄带隙半导体膜形成的沟道区。 在窄带隙半导体膜上形成栅极电介质层。 然后在栅极电介质上形成栅电极。 由宽带隙半导体膜或金属形成的一对源极/漏极区域形成在栅电极的相对侧并与低带隙半导体膜相邻。