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公开(公告)号：US20100032732A1
公开(公告)日：2010-02-11
申请号：US12187003
申请日：2008-08-06
申请人： Roger A. Booth, JR. , Kangguo Cheng , Chandrasekharan Kothandaraman , Chengwen Pei , Ravi M. Todi , Xiaojun Yu
发明人： Roger A. Booth, JR. , Kangguo Cheng , Chandrasekharan Kothandaraman , Chengwen Pei , Ravi M. Todi , Xiaojun Yu
IPC分类号： H01L29/78 , H01L21/336 , H01L23/525
CPC分类号： H01L23/5252 , H01L27/11206 , H01L27/115 , H01L2924/0002 , H01L2924/00
摘要： An electrical antifuse comprising a field effect transistor includes a gate dielectric having two gate dielectric portions. Upon application of electric field across the gate dielectric, the magnitude of the electrical field is locally enhanced at the boundary between the thick and thin gate dielectric portions due to the geometry, thereby allowing programming of the electrical antifuse at a lower supply voltage between the two electrodes, i.e., the body and the gate electrode of the transistor, across the gate dielectric.
摘要翻译： 包括场效应晶体管的电反熔丝包括具有两个栅电介质部分的栅极电介质。 在栅极电介质上施加电场时，由于几何形状，在厚和薄栅介质部分之间的边界处，电场的幅度被局部增强，从而允许在两个电源电压之间的较低电源电压下对电反熔丝进行编程 电极，即晶体管的主体和栅电极，跨过栅极电介质。
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公开(公告)号：US07825479B2
公开(公告)日：2010-11-02
申请号：US12187003
申请日：2008-08-06
申请人： Roger A. Booth, Jr. , Kangguo Cheng , Chandrasekharan Kothandaraman , Chengwen Pei , Ravi M. Todi , Xiaojun Yu
发明人： Roger A. Booth, Jr. , Kangguo Cheng , Chandrasekharan Kothandaraman , Chengwen Pei , Ravi M. Todi , Xiaojun Yu
IPC分类号： H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： H01L23/5252 , H01L27/11206 , H01L27/115 , H01L2924/0002 , H01L2924/00
摘要： An electrical antifuse comprising a field effect transistor includes a gate dielectric having two gate dielectric portions. Upon application of electric field across the gate dielectric, the magnitude of the electrical field is locally enhanced at the boundary between the thick and thin gate dielectric portions due to the geometry, thereby allowing programming of the electrical antifuse at a lower supply voltage between the two electrodes, i.e., the body and the gate electrode of the transistor, across the gate dielectric.
摘要翻译： 包括场效应晶体管的电反熔丝包括具有两个栅电介质部分的栅极电介质。 在栅极电介质上施加电场时，由于几何形状，在厚和薄栅介质部分之间的边界处，电场的幅度被局部增强，从而允许在两个电源电压之间的较低电源电压下对电反熔丝进行编程 电极，即晶体管的主体和栅电极，跨过栅极电介质。
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公开(公告)号：US20120184073A1
公开(公告)日：2012-07-19
申请号：US13433423
申请日：2012-03-29
IPC分类号： H01L21/336
CPC分类号： H01L29/78 , H01L21/28282 , H01L21/823462 , H01L21/823468 , H01L27/1052 , H01L27/11573 , H01L29/4234 , H01L29/4983 , H01L29/517 , H01L29/6659 , H01L29/66833 , H01L29/792
摘要： A method of fabricating a memory device is provided that may begin with forming a layered gate stack atop a semiconductor substrate and patterning a metal electrode layer stopping on the high-k gate dielectric layer of the layered gate stack to provide a first metal gate electrode and a second metal gate electrode on the semiconductor substrate. In a next process sequence, at least one spacer is formed on the first metal gate electrode atop a portion of the high-k gate dielectric layer, wherein a remaining portion of the high-k gate dielectric is exposed. The remaining portion of the high-k gate dielectric layer is etched to provide a first high-k gate dielectric having a portion that extends beyond a sidewall of the first metal gate electrode and a second high-k gate dielectric having an edge that is aligned to a sidewall of the second metal gate electrode.
摘要翻译： 提供一种制造存储器件的方法，其可以开始于在半导体衬底顶上形成分层栅极堆叠并且图案化停止在层状栅叠层的高k栅极电介质层上的金属电极层，以提供第一金属栅电极和 半导体衬底上的第二金属栅电极。 在下一个处理顺序中，在第一金属栅电极的高k栅介质层的一部分顶上形成至少一个间隔物，其中高k栅极电介质的剩余部分被暴露。 蚀刻高k栅极电介质层的剩余部分以提供具有延伸超过第一金属栅电极的侧壁的部分的第一高k栅极电介质和具有对准边缘的第二高k栅极电介质 到第二金属栅电极的侧壁。
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公开(公告)号：US08629009B2
公开(公告)日：2014-01-14
申请号：US13433423
申请日：2012-03-29
IPC分类号： H01L21/336
CPC分类号： H01L29/78 , H01L21/28282 , H01L21/823462 , H01L21/823468 , H01L27/1052 , H01L27/11573 , H01L29/4234 , H01L29/4983 , H01L29/517 , H01L29/6659 , H01L29/66833 , H01L29/792
摘要： A method of fabricating a memory device is provided that may begin with forming a layered gate stack atop a semiconductor substrate and patterning a metal electrode layer stopping on the high-k gate dielectric layer of the layered gate stack to provide a first metal gate electrode and a second metal gate electrode on the semiconductor substrate. In a next process sequence, at least one spacer is formed on the first metal gate electrode atop a portion of the high-k gate dielectric layer, wherein a remaining portion of the high-k gate dielectric is exposed. The remaining portion of the high-k gate dielectric layer is etched to provide a first high-k gate dielectric having a portion that extends beyond a sidewall of the first metal gate electrode and a second high-k gate dielectric having an edge that is aligned to a sidewall of the second metal gate electrode.
摘要翻译： 提供一种制造存储器件的方法，其可以开始于在半导体衬底顶上形成分层栅极堆叠并且图案化停止在层状栅叠层的高k栅极电介质层上的金属电极层，以提供第一金属栅电极和 半导体衬底上的第二金属栅电极。 在下一个处理顺序中，在第一金属栅电极的高k栅介质层的一部分顶上形成至少一个间隔物，其中高k栅极电介质的剩余部分被暴露。 蚀刻高k栅极电介质层的剩余部分以提供具有延伸超过第一金属栅电极的侧壁的部分的第一高k栅极电介质和具有对准边缘的第二高k栅极电介质 到第二金属栅电极的侧壁。
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5.发明申请STRUCTURE AND METHOD FOR FORMING PROGRAMMABLE HIGH-K/METAL GATE MEMORY DEVICE 有权用于形成可编程高K /金属栅存储器件的结构和方法公开(公告)号：US20100181620A1
公开(公告)日：2010-07-22
申请号：US12355954
申请日：2009-01-19
IPC分类号： H01L29/786 , H01L21/336 , H01L21/331 , H01L21/8234 , H01L27/115 , H01L21/8232 , H01L29/78
CPC分类号： H01L29/78 , H01L21/28282 , H01L21/823462 , H01L21/823468 , H01L27/1052 , H01L27/11573 , H01L29/4234 , H01L29/4983 , H01L29/517 , H01L29/6659 , H01L29/66833 , H01L29/792
摘要： A method of fabricating a memory device is provided that may begin with forming a layered gate stack overlying a semiconductor substrate and patterning a metal electrode layer stopping on the high-k gate dielectric layer of the layered gate stack to provide a first metal gate electrode and a second metal gate electrode on the semiconductor substrate. In a next process sequence, at least one spacer is formed on the first metal gate electrode overlying a portion of the high-k gate dielectric layer, wherein a remaining portion of the high-k gate dielectric is exposed. The remaining portion of the high-k gate dielectric layer is etched to provide a first high-k gate dielectric having a portion that extends beyond a sidewall of the first metal gate electrode and a second high-k gate dielectric having an edge that is aligned to a sidewall of the second metal gate electrode.
摘要翻译： 提供了一种制造存储器件的方法，其可以开始形成覆盖在半导体衬底上的层叠栅极堆叠并且图案化停止在层状栅极堆叠的高k栅极电介质层上的金属电极层，以提供第一金属栅电极和 半导体衬底上的第二金属栅电极。 在下一个处理顺序中，在第一金属栅电极上形成至少一个间隔物，该第一金属栅电极覆盖高k栅极电介质层的一部分，其中暴露高k栅极电介质的剩余部分。 蚀刻高k栅极电介质层的剩余部分以提供具有延伸超过第一金属栅电极的侧壁的部分的第一高k栅极电介质和具有对准边缘的第二高k栅极电介质 到第二金属栅电极的侧壁。
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公开(公告)号：US20110031582A1
公开(公告)日：2011-02-10
申请号：US12538381
申请日：2009-08-10
IPC分类号： H01L23/525 , H01L21/768
CPC分类号： H01L23/5252 , H01L2924/0002 , H01L2924/00
摘要： A method forms an anti-fuse structure comprises a plurality of parallel conductive fins positioned on a substrate, each of the fins has a first end and a second end. A second electrical conductor is electrically connected to the second end of the fins. An insulator covers the first end of the fins and a first electrical conductor is positioned on the insulator. The first electrical conductor is electrically insulated from the first end of the fins by the insulator. The insulator is formed to a thickness sufficient to break down on the application of a predetermined voltage between the second electrical conductor and the first electrical conductor and thereby form an uninterrupted electrical connection between the second electrical conductor and the first electrical conductor through the fins.
摘要翻译： 一种形成抗熔丝结构的方法包括位于基板上的多个平行的导电翅片，每个翼片具有第一端和第二端。 第二电导体电连接到散热片的第二端。 绝缘体覆盖翅片的第一端并且第一电导体位于绝缘体上。 第一电导体通过绝缘体与散热片的第一端电绝缘。 绝缘体形成为足以在第二电导体和第一电导体之间施加预定电压时分解的厚度，从而通过翅片在第二电导体和第一电导体之间形成不间断的电连接。
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公开(公告)号：US08030736B2
公开(公告)日：2011-10-04
申请号：US12538381
申请日：2009-08-10
CPC分类号： H01L23/5252 , H01L2924/0002 , H01L2924/00
摘要： A method forms an anti-fuse structure comprises a plurality of parallel conductive fins positioned on a substrate, each of the fins has a first end and a second end. A second electrical conductor is electrically connected to the second end of the fins. An insulator covers the first end of the fins and a first electrical conductor is positioned on the insulator. The first electrical conductor is electrically insulated from the first end of the fins by the insulator. The insulator is formed to a thickness sufficient to break down on the application of a predetermined voltage between the second electrical conductor and the first electrical conductor and thereby form an uninterrupted electrical connection between the second electrical conductor and the first electrical conductor through the fins.
摘要翻译： 一种形成抗熔丝结构的方法包括位于基板上的多个平行的导电翅片，每个翼片具有第一端和第二端。 第二电导体电连接到散热片的第二端。 绝缘体覆盖翅片的第一端并且第一电导体位于绝缘体上。 第一电导体通过绝缘体与散热片的第一端电绝缘。 绝缘体形成为足以在第二电导体和第一电导体之间施加预定电压时分解的厚度，从而通过翅片在第二电导体和第一电导体之间形成不间断的电连接。
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公开(公告)号：US08525263B2
公开(公告)日：2013-09-03
申请号：US12355954
申请日：2009-01-19
IPC分类号： H01L29/786 , H01L21/336 , H01L29/78
CPC分类号： H01L29/78 , H01L21/28282 , H01L21/823462 , H01L21/823468 , H01L27/1052 , H01L27/11573 , H01L29/4234 , H01L29/4983 , H01L29/517 , H01L29/6659 , H01L29/66833 , H01L29/792
摘要： A method of fabricating a memory device is provided that may begin with forming a layered gate stack overlying a semiconductor substrate and patterning a metal electrode layer stopping on the high-k gate dielectric layer of the layered gate stack to provide a first metal gate electrode and a second metal gate electrode on the semiconductor substrate. In a next process sequence, at least one spacer is formed on the first metal gate electrode overlying a portion of the high-k gate dielectric layer, wherein a remaining portion of the high-k gate dielectric is exposed. The remaining portion of the high-k gate dielectric layer is etched to provide a first high-k gate dielectric having a portion that extends beyond a sidewall of the first metal gate electrode and a second high-k gate dielectric having an edge that is aligned to a sidewall of the second metal gate electrode.
摘要翻译： 提供了一种制造存储器件的方法，其可以开始形成覆盖在半导体衬底上的层叠栅极堆叠并且图案化停止在层状栅极堆叠的高k栅极电介质层上的金属电极层，以提供第一金属栅电极和 半导体衬底上的第二金属栅电极。 在下一个处理顺序中，在第一金属栅电极上形成至少一个间隔物，该第一金属栅电极覆盖高k栅极电介质层的一部分，其中暴露高k栅极电介质的剩余部分。 蚀刻高k栅极电介质层的剩余部分以提供具有延伸超过第一金属栅电极的侧壁的部分的第一高k栅极电介质和具有对准边缘的第二高k栅极电介质 到第二金属栅电极的侧壁。
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公开(公告)号：US20100193854A1
公开(公告)日：2010-08-05
申请号：US12692923
申请日：2010-01-25
IPC分类号： H01L29/76 , H01L21/335
CPC分类号： H01L29/7923 , H01L29/66833
摘要： Each of a hot-carrier non-volatile memory device and a method for fabricating the hot carrier non-volatile memory device is predicated upon a semiconductor structure and related method that includes a metal oxide semiconductor field effect transistor structure. The semiconductor structure and related method include at least one of: (1) a spacer that comprises a dielectric material having a dielectric constant greater than 7 (for enhanced hot carrier derived charge capture and retention); and (2) a drain region that comprises a semiconductor material that has a narrower bandgap than a bandgap of a semiconductor material from which is comprised a channel region (for enhanced impact ionization and charged carrier generation).
摘要翻译： 热载体非易失性存储器件和用于制造热载体非易失性存储器件的方法中的每一种都取决于包括金属氧化物半导体场效应晶体管结构的半导体结构和相关方法。 半导体结构和相关方法包括以下中的至少一个：（1）包括介电常数大于7的介电材料的间隔物（用于增强热载体导电的电荷捕获和保留）; 和（2）包括半导体材料的漏极区，该半导体材料具有比半导体材料的带隙窄的带隙，其包括沟道区（用于增强的冲击电离和带电载流子的生成）。
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公开(公告)号：US08384145B2
公开(公告)日：2013-02-26
申请号：US12692923
申请日：2010-01-25
IPC分类号： H01L29/76
CPC分类号： H01L29/7923 , H01L29/66833
摘要： Each of a hot-carrier non-volatile memory device and a method for fabricating the hot carrier non-volatile memory device is predicated upon a semiconductor structure and related method that includes a metal oxide semiconductor field effect transistor structure. The semiconductor structure and related method include at least one of: (1) a spacer that comprises a dielectric material having a dielectric constant greater than 7 (for enhanced hot carrier derived charge capture and retention); and (2) a drain region that comprises a semiconductor material that has a narrower bandgap than a bandgap of a semiconductor material from which is comprised a channel region (for enhanced impact ionization and charged carrier generation).
摘要翻译： 热载体非易失性存储器件和用于制造热载体非易失性存储器件的方法中的每一种都取决于包括金属氧化物半导体场效应晶体管结构的半导体结构和相关方法。 半导体结构和相关方法包括以下中的至少一个：（1）包括介电常数大于7的介电材料的间隔物（用于增强热载体导电的电荷捕获和保留）; 和（2）包括半导体材料的漏极区，该半导体材料具有比半导体材料的带隙窄的带隙，其包括沟道区（用于增强的冲击电离和带电载流子的生成）。
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