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公开(公告)号：US5043043A
公开(公告)日：1991-08-27
申请号：US542435
申请日：1990-06-22
申请人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
发明人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.
摘要翻译： 静电微电机采用侧驱设计。 定子在一个减法器上方的平面中工作，并且可移动构件位于定子的平面内并移动。 产生并维持操作强度的静电场，而不会在定子和可移动构件的边缘之间的平面内发生故障。 三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。 一个制造工艺沉积和图案化结构层，以在牺牲层上形成定子和可移动构件。 第二制造工艺蚀刻第一结构层中的通道以勾勒定子，可移动构件，并且如果需要，轮廓轴承。 衬底连接到结构层的侧面，通道通过该侧被蚀刻并且相对侧被研磨到通道的端部，以形成凸出的定子，转子以及如果需要的话承载结构。 第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。 然后在衬底和牺牲层上沉积和图案化结构层，以在公共平面中形成定子和可移动构件。 还通过制造工艺提供了谐波侧驱动微电机。
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公开(公告)号：US4997521A
公开(公告)日：1991-03-05
申请号：US342952
申请日：1989-04-25
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element within the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
摘要翻译： 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与定子内的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。
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公开(公告)号：US4943750A
公开(公告)日：1990-07-24
申请号：US376208
申请日：1989-07-03
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
摘要翻译： 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与具有定子的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。
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公开(公告)号：US08149597B2
公开(公告)日：2012-04-03
申请号：US12870326
申请日：2010-08-27
IPC分类号： H02M3/335
CPC分类号： H02M3/33592 , H02M2001/008 , Y02B70/1475 , Y10T307/406
摘要： A dc-dc converter system comprises a quasi-regulated bus converter and plural regulation stages that regulate the output of the bus converter. The bus converter has at least one controlled rectifier with a parallel uncontrolled rectifier. A control circuit controls the controlled rectifier to cause a normally non-regulated mode of operation through a portion of an operating range of source voltage and a regulated output during another portion. The bus converter may be an isolation stage having primary and secondary transformer winding circuits. For the non-regulated output, each primary winding has a voltage waveform with a fixed duty cycle. The fixed duty cycle causes substantially uninterrupted flow of power during non-regulated operation. Inductors at the bus converter input and in a filter at the output of the bus converter may saturate during non-regulated operation.
摘要翻译： 一个dc-dc转换器系统包括准调节总线转换器和多个调节总线转换器输出的调节级。 总线转换器具有至少一个具有并联不可控整流器的受控整流器。 控制电路控制可控整流器通过源电压的工作范围的一部分和另一部分的稳压输出引起正常的非调节工作模式。 总线转换器可以是具有初级和次级变压器绕组电路的隔离级。 对于非稳压输出，每个初级绕组具有固定占空比的电压波形。 固定占空比在非调节操作期间导致基本上不间断的电力流动。 在总线转换器输入端和总线转换器输出端的滤波器中的电感器可能在非调节操作期间饱和。
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公开(公告)号：US20110235370A1
公开(公告)日：2011-09-29
申请号：US13157439
申请日：2011-06-10
申请人： Martin F. Schlecht
发明人： Martin F. Schlecht
IPC分类号： H02M3/335
CPC分类号： H02M3/33546 , H02M3/335 , H02M3/33553 , H02M3/33592 , H02M3/3372 , H02M3/3374 , H02M2001/007 , Y02B70/1475 , Y10T307/406
摘要： A power converter nearly losslessly delivers energy and recovers energy from capacitors associated with controlled rectifiers in a secondary winding circuit, each controlled rectifier having a parallel uncontrolled rectifier. First and second primary switches in series with first and second primary windings, respectively, are turned on for a fixed duty cycle, each for approximately one half of the switching cycle. Switched transition times are short relative to the on-state and off-state times of the controlled rectifiers. The control inputs to the controlled rectifiers are cross-coupled from opposite secondary transformer windings.
摘要翻译： 电力转换器几乎无损耗地递送能量并从次级绕组电路中与受控整流器相关联的电容器恢复能量，每个可控整流器具有并联的不受控制的整流器。 分别与第一和第二初级绕组串联的第一和第二初级开关分别导通固定工作周期，每个开关约为开关周期的大约一半。 开关转换时间相对于受控整流器的导通状态和截止状态时间短。 控制整流器的控制输入与相邻的次级变压器绕组交叉耦合。
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公开(公告)号：US20080151582A1
公开(公告)日：2008-06-26
申请号：US11900207
申请日：2007-09-10
申请人： Martin F. Schlecht
发明人： Martin F. Schlecht
IPC分类号： H02M3/335
CPC分类号： H02M3/33546 , H02M3/335 , H02M3/33553 , H02M3/33592 , H02M3/3372 , H02M3/3374 , H02M2001/007 , Y02B70/1475 , Y10T307/406
摘要： A power converter nearly losslessly delivers energy and recovers energy from capacitors associated with controlled rectifiers in a secondary winding circuit, each controlled rectifier having a parallel uncontrolled rectifier. First and second primary switches in series with first and second primary windings, respectively, are turned on for a fixed duty cycle, each for approximately one half of the switching cycle. Switched transition times are short relative to the on-state and off-state times of the controlled rectifiers. The control inputs to the controlled rectifiers are cross-coupled from opposite secondary transformer windings.
摘要翻译： 电力转换器几乎无损耗地递送能量并从次级绕组电路中与受控整流器相关联的电容器恢复能量，每个可控整流器具有并联的不受控制的整流器。 分别与第一和第二初级绕组串联的第一和第二初级开关分别导通固定工作周期，每个开关约为开关周期的大约一半。 开关转换时间相对于受控整流器的导通状态和截止状态时间短。 控制整流器的控制输入与相邻的次级变压器绕组交叉耦合。
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公开(公告)号：US20080151580A1
公开(公告)日：2008-06-26
申请号：US11901263
申请日：2007-09-14
申请人： Martin F. Schlecht
发明人： Martin F. Schlecht
IPC分类号： H02M3/337
CPC分类号： H02M3/335 , H02J1/102 , H02M3/33592 , H02M3/3372 , H02M3/3374 , H02M2001/007 , Y02B70/1475
摘要： A power converter nearly losslessly delivers energy and recovers energy from capacitors associated with controlled rectifiers in a secondary winding circuit, each controlled rectifier having a parallel uncontrolled rectifier. First and second primary switches in series with first and second primary windings, respectively, are turned on for a fixed duty cycle, each for approximately one half of the switching cycle. Switched transition times are short relative to the on-state and off-state times of the controlled rectifiers. The control inputs to the controlled rectifiers are cross-coupled from opposite secondary transformer windings.
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公开(公告)号：US07564702B2
公开(公告)日：2009-07-21
申请号：US11901263
申请日：2007-09-14
申请人： Martin F. Schlecht
发明人： Martin F. Schlecht
CPC分类号： H02M3/335 , H02J1/102 , H02M3/33592 , H02M3/3372 , H02M3/3374 , H02M2001/007 , Y02B70/1475
摘要： A power converter nearly losslessly delivers energy and recovers energy from capacitors associated with controlled rectifiers in a secondary winding circuit, each controlled rectifier having a parallel uncontrolled rectifier. First and second primary switches in series with first and second primary windings, respectively, are turned on for a fixed duty cycle, each for approximately one half of the switching cycle. Switched transition times are short relative to the on-state and off-state times of the controlled rectifiers. The control inputs to the controlled rectifiers are cross-coupled from opposite secondary transformer windings.
摘要翻译： 电力转换器几乎无损耗地递送能量并从次级绕组电路中与受控整流器相关联的电容器恢复能量，每个可控整流器具有并联的不受控制的整流器。 分别与第一和第二初级绕组串联的第一和第二初级开关分别导通固定工作周期，每个开关约为开关周期的大约一半。 开关转换时间相对于受控整流器的导通状态和截止状态时间短。 控制整流器的控制输入与相邻的次级变压器绕组交叉耦合。
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公开(公告)号：US07269034B2
公开(公告)日：2007-09-11
申请号：US11509146
申请日：2006-08-23
申请人： Martin F. Schlecht
发明人： Martin F. Schlecht
CPC分类号： H02M3/33546 , H02M3/335 , H02M3/33553 , H02M3/33592 , H02M3/3372 , H02M3/3374 , H02M2001/007 , Y02B70/1475 , Y10T307/406
摘要： A power converter nearly losslessly delivers energy and recovers energy from capacitors associated with controlled rectifiers in a secondary winding circuit, each controlled rectifier having a parallel uncontrolled rectifier. First and second primary switches in series with first and second primary windings, respectively, are turned on for a fixed duty cycle, each for approximately one half of the switching cycle. Switched transition times are short relative to the on-state and off-state times of the controlled rectifiers. The control inputs to the controlled rectifiers are cross-coupled from opposite secondary transformer windings.
摘要翻译： 电力转换器几乎无损耗地递送能量并从次级绕组电路中与受控整流器相关联的电容器恢复能量，每个可控整流器具有并联的不受控制的整流器。 分别与第一和第二初级绕组串联的第一和第二初级开关分别导通固定工作周期，每个开关约为开关周期的大约一半。 开关转换时间相对于受控整流器的导通状态和截止状态时间短。 控制整流器的控制输入与相邻的次级变压器绕组交叉耦合。
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公开(公告)号：US5999417A
公开(公告)日：1999-12-07
申请号：US12475
申请日：1998-01-23
申请人： Martin F. Schlecht
发明人： Martin F. Schlecht
CPC分类号： H02M3/335 , H02J1/102 , H02M3/33592 , H02M3/3372 , H02M3/3374 , H02M2001/007 , Y02B70/1475
摘要： A power converter nearly losslessly delivers energy and recovers energy from capacitors associated with controlled rectifiers in a secondary winding circuit, each controlled rectifier having a parallel uncontrolled rectifier. First and second primary switches in series with first and second primary windings, respectively, are turned on for a fixed duty cycle, each for approximately one half of the switching cycle. Switched transition times are short relative to the on-state and off-state times of the controlled rectifiers. The control inputs to the controlled rectifiers are cross-coupled from opposite secondary transformer windings.
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