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公开(公告)号：US5043043A
公开(公告)日：1991-08-27
申请号：US542435
申请日：1990-06-22
申请人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
发明人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.
摘要翻译： 静电微电机采用侧驱设计。 定子在一个减法器上方的平面中工作，并且可移动构件位于定子的平面内并移动。 产生并维持操作强度的静电场，而不会在定子和可移动构件的边缘之间的平面内发生故障。 三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。 一个制造工艺沉积和图案化结构层，以在牺牲层上形成定子和可移动构件。 第二制造工艺蚀刻第一结构层中的通道以勾勒定子，可移动构件，并且如果需要，轮廓轴承。 衬底连接到结构层的侧面，通道通过该侧被蚀刻并且相对侧被研磨到通道的端部，以形成凸出的定子，转子以及如果需要的话承载结构。 第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。 然后在衬底和牺牲层上沉积和图案化结构层，以在公共平面中形成定子和可移动构件。 还通过制造工艺提供了谐波侧驱动微电机。
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公开(公告)号：US4997521A
公开(公告)日：1991-03-05
申请号：US342952
申请日：1989-04-25
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element within the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
摘要翻译： 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与定子内的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。
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公开(公告)号：US4943750A
公开(公告)日：1990-07-24
申请号：US376208
申请日：1989-07-03
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
摘要翻译： 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与具有定子的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。
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公开(公告)号：US4823607A
公开(公告)日：1989-04-25
申请号：US51526
申请日：1987-05-18
CPC分类号： G01N3/00 , G01N1/32 , G01N2033/0096 , G01N2203/0053 , G01N2203/0075 , G01N2203/008 , G01N2203/0254 , G01N2203/0282 , G01N2203/0647
摘要： Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.
摘要翻译： 释放的膜结构用于测量膜材料的机械性能。 通过测量在固有拉伸应力下保持的薄膜结构的变形然后释放，可以精确地测量这些机械性能。
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公开(公告)号：US4896098A
公开(公告)日：1990-01-23
申请号：US273106
申请日：1988-11-16
IPC分类号： G01N13/00
CPC分类号： G01N13/00
摘要： A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate. The cavity beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optic readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.
摘要翻译： 在存在波动压力的情况下，使用微桥来精确测量时变剪切力。 通过臂悬挂微尺寸板以形成微桥。 微尺寸使得能够在板的整个表面均匀地感测到感兴趣的最小湍流尺度。 微桥下面的空腔很小，使得在空腔内的空气中产生粘性阻力并阻尼板的正常运动。 结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感，并因此感测与法向力无关的侧向力。 微桥传感器通过表面微加工制造。 牺牲层沉积在衬底上。 沉积并图案化结构层以在牺牲层上形成板和支撑臂。 通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。 在差分电容读出方案中，微桥板中的导电层与衬底中的导体电容耦合。 感测到的电容耦合变化产生板偏转的指示，从而产生与垂直运动无关的剪切应力。 也可以采用光学读出方案，并且容易地结合在制造过程中。 安装构件将微桥传感器压入保持板，该保持板适合与目标壁齐平的匹配槽。
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公开(公告)号：US06392313B1
公开(公告)日：2002-05-21
申请号：US09354544
申请日：1999-07-15
申请人： Alan H. Epstein , Stephen D. Senturia , Ian A. Waitz , Jeffrey H. Lang , Stuart A. Jacobson , Fredric F. Ehrich , Martin A. Schmidt , G. K. Ananthasuresh , Mark S. Spearing , Kenneth S. Breuer , Steven F. Nagle
发明人： Alan H. Epstein , Stephen D. Senturia , Ian A. Waitz , Jeffrey H. Lang , Stuart A. Jacobson , Fredric F. Ehrich , Martin A. Schmidt , G. K. Ananthasuresh , Mark S. Spearing , Kenneth S. Breuer , Steven F. Nagle
IPC分类号： H01L2984
CPC分类号： F23R3/42 , F01D5/28 , F01D15/06 , F01D25/20 , F01K13/00 , F02C3/05 , F02K9/48 , F05D2220/50 , F05D2230/14 , F05D2250/82 , F05D2250/84 , F05D2300/2261 , F05D2300/2283 , F05D2300/607 , F23C2900/03001
摘要： The invention overcomes limitations of conventional power and thermodynamic sources by with micromachinery components that enable production of significant power and efficient operation of thermodynamic systems in the millimeter and micron regime to meet the efficiency, mobility, modularity, weight, and cost requirements of many modern applications. A micromachine of the invention has a rotor disk journalled for rotation in a stationary structure by a journal bearing. A plurality of radial flow rotor blades, substantially untapered in height, are disposed on a first rotor disk face, and an electrically conducting region is disposed on a rotor disk face. A plurality of stator electrodes that are electrically interconnected to define multiple electrical stator phases are disposed on a wall of the stationary structure located opposite the electrically conducting region of the rotor disk. A first orifice in the stationary structure provides fluidic communication with the first rotor disk face at a location radially central of the rotor blades, and a second orifice in the stationary structure provides fluidic communication with the first rotor disk face at a location radially peripheral of the rotor blades. An electrical connection to the stator electrode configuration is provided for stator electrode excitation and for power transfer with the stator electrode configuration as the rotor disk rotates.
摘要翻译： 本发明克服了常规功率和热力学源的限制，其中微机械组件能够在毫米和微米范围内产生显着功率和热力系统的有效运行，以满足许多现代应用的效率，移动性，模块化，重量和成本要求 。 本发明的微型机械具有转轴，该转子盘通过轴颈轴承在静止结构中旋转。 基本上没有高度的多个径流式转子叶片设置在第一转子盘面上，导电区域设置在转子盘面上。 电气互连以限定多个电定子相的多个定子电极设置在固定结构的与转子盘的导电区域相对的位置的壁上。 固定结构中的第一孔口在转子叶片的径向中心的位置处提供与第一转子盘面的流体连通，并且固定结构中的第二孔口在第一转子盘面的径向周边的位置处提供与第一转子盘面的流体连通 转子叶片。 提供与定子电极配置的电连接用于定子电极激励和用于当转子盘旋转时具有定子电极配置的功率传递。
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公开(公告)号：US5932940A
公开(公告)日：1999-08-03
申请号：US749454
申请日：1996-11-15
申请人： Alan H. Epstein , Stephen D. Senturia , Ian A. Waitz , Jeffrey H. Lang , Stuart A. Jacobson , Fredric F. Ehrich , Martin A. Schmidt , G. K. Ananthasuresh , Mark S. Spearing , Kenneth S. Breuer , Steven F. Nagle
发明人： Alan H. Epstein , Stephen D. Senturia , Ian A. Waitz , Jeffrey H. Lang , Stuart A. Jacobson , Fredric F. Ehrich , Martin A. Schmidt , G. K. Ananthasuresh , Mark S. Spearing , Kenneth S. Breuer , Steven F. Nagle
IPC分类号： F01D5/28 , F01D15/06 , F01D25/20 , F01K13/00 , F02C3/05 , F02K9/48 , F23R3/42 , H01L29/84 , F02C3/04 , H02K29/00
CPC分类号： F23R3/42 , F01D15/06 , F01D25/20 , F01D5/28 , F01K13/00 , F02C3/05 , F02K9/48 , F05D2220/50 , F05D2230/14 , F05D2250/82 , F05D2250/84 , F05D2300/2261 , F05D2300/2283 , F05D2300/607 , F23C2900/03001
摘要： The invention provides a micro-gas turbine engine and associated microcomponentry. The engine components, including, e.g., a compressor, a diffuser having diffuser vanes, a combustion chamber, turbine guide vanes, and a turbine are each manufactured by, e.g., microfabrication techniques, of a structural material common to all of the elements, e.g., a microelectronic material such as silicon or silicon carbide. Vapor deposition techniques, as well as bulk wafer etching techniques, can be employed to produce the engine. The engine includes a rotor having a shaft with a substantially untapered compressor disk on a first end, defining a centrifugal compressor, and a substantially untapered turbine disk on the opposite end, defining a radial inflow turbine. The rotor is preferably formed of a material characterized by a strength-to-density ratio that enables a rotor speed of at least about 500,000 rotations per minute. An annular, axial-flow combustion chamber is provided that is located axially between the compressor and turbine disks and that has a ratio of annular height to axial length of at least about 0.5. The micro-gas turbine engine can be configured with an integral microgenerator as a source of electrical power, and can be employed for a wide range of power, propulsion, and thermodynamic cycle applications.
摘要翻译： 本发明提供了一种微型燃气涡轮发动机和相关的微型部件。 包括例如压缩机，具有扩散器叶片的扩散器，燃烧室，涡轮引导叶片和涡轮机的发动机部件各自通过例如微细加工技术制造所有元件共有的结构材料，例如 ，微电子材料如硅或碳化硅。 可以采用气相沉积技术以及体晶片蚀刻技术来生产发动机。 发动机包括具有轴的转子，该轴具有在第一端上具有基本上未经紧固的压缩机盘，限定离心式压缩机，以及在相对端上限定径向流入涡轮机的基本上未配套的涡轮盘。 转子优选由特征在于强度与密度之比的材料形成，其能够使转子速度为每分钟至少约50万转。 提供了一种环形的轴向流动燃烧室，其轴向位于压缩机和涡轮盘之间，并且具有至少约0.5的环形高度与轴向长度的比率。 微型燃气涡轮发动机可以配置有作为电力源的整体微型发电机，并且可以用于广泛的功率，推进和热力循环应用。
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公开(公告)号：US4942767A
公开(公告)日：1990-07-24
申请号：US360325
申请日：1989-06-02
IPC分类号： H04R23/00
CPC分类号： H04R23/008
摘要： A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.
摘要翻译： 微加工膜片位于与光纤端部的间隙上。 光纤和隔膜一体安装。 光纤的端部提供了一个局部参考平面，它将穿过光纤的光分成隔膜。 光被分割成随后从光阑反射的透射部分和与随后的光阑反射部分干涉的局部反射部分。 两个反射部件的干涉形成通过光纤带回光检测器的干涉光图案。 干涉图形提供了膜片偏转的指示，作为横跨隔膜的暴露侧的施加压力的函数。 通过使用位于隔膜间隙的第二纤维来提供膜片偏转的幅度和方向的检测。 第二光纤以与第一光纤相同的方式提供干涉图案，但是具有相移。 允许环境和间隙之间的通信的开口使得能够使用干涉仪传感器作为剪切应力测量装置。
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公开(公告)号：US4926696A
公开(公告)日：1990-05-22
申请号：US932780
申请日：1986-11-19
IPC分类号： H04R23/00
CPC分类号： G01L9/0079 , H04R23/008
摘要： A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.
摘要翻译： 薄隔膜承受一侧的压力，并面对另一侧的分束器。 分束器一体地附接到隔膜，并用作整个组件的局部光学参考平面。 来自光源的相干光部分地在分束器处反射。 剩余的光从隔膜反射。 反射光束在检测点复合，并具有作为光阑偏转量的函数的相位差。 检测到的重组光束表示膜片的偏转。 组件的光学校准是隔膜和分束器之间的距离的函数，其保持为预定义，因为分束器与隔膜成一体。 在隔膜和分束器之间形成的小空腔中的通风口使得隔膜能够以更高的灵敏度感测小压力。 通过微型制造技术，膜片对动态和静态压力敏感。 检测组件的热膨胀以及隔膜的偏转使得能够将检测到的压力测量作为检测到的热膨胀和挠曲之间的差。
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公开(公告)号：US5834627A
公开(公告)日：1998-11-10
申请号：US766142
申请日：1996-12-17
申请人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
发明人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
CPC分类号： G01N27/16
摘要： A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.
摘要翻译： 一种可燃气体传感器，其使用电阻加热的贵金属涂覆的微加工多晶硅丝来量热检测可燃气体的存在和浓度。 到目前为止测试的长丝是2μm厚的10μm宽×100,250,500或1000μm长的多晶Si; 有些被外涂了0.25μm厚的保护性CVD Si 3 N 4层。 通过CVD将Pt催化Pt薄膜从前体Pt（acac）2沉积到电阻加热至约500℃的微丝上; Pt仅在热丝上沉积。 使用恒电阻模式反馈电路，Pt涂层长丝在约 在80/20 N2 / O2混合物中，在保持恒定电阻（温度）所需的电源电流变化为100 ppm和1％之间，300°C（35 mW输入功率）线性响应。 也可以使用其它催化剂。
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