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    DELIVERY DEVICE, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME
    2.
    发明申请
    DELIVERY DEVICE, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME 有权
    交付设备，其制造方法和包含其的文章

    公开(公告)号：US20150203962A1

    公开(公告)日：2015-07-23

    申请号：US14567292

    申请日：2014-12-11

    Applicant: Rohm and Haas Electronic Materials LLC

    Inventor： Egbert Woelk ,  Ronald L. DiCarlo ,  Deodatta Vinayak Shenai-Khatkhate

    IPC: C23C16/448 ,  C23C16/44 ,  C23C16/455

    CPC classification number: C23C16/4482 ,  B01B1/005 ,  B01B1/06 ,  B01D1/14 ,  B01J4/002 ,  B01J4/004 ,  B01J4/02 ,  C23C16/4407 ,  C23C16/45561 ,  Y10T137/0391 ,  Y10T137/2076

    Abstract: Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.

    Abstract translation: 本文公开了一种包括腔室的输送装置; 气体入口 气体出口 以及容纳在所述室内并具有上部和下部的汲取管，所述汲取管的上部与所述气体入口流体连通并且可操作以允许载气的进入; 浸入管的下部延伸到室中，浸入管的下部终止于出口端; 和袖子; 其中套筒具有第一端和第二端; 第一端与汲取管的下部过盈配合; 并且套筒在受到干扰时发生振动。

    VAPOR DELIVERY DEVICE, METHODS OF MANUFACTURE AND METHODS OF USE THEREOF
    3.
    发明申请
    VAPOR DELIVERY DEVICE, METHODS OF MANUFACTURE AND METHODS OF USE THEREOF 审中-公开
    蒸气输送装置，制造方法及其使用方法

    公开(公告)号：US20160122870A1

    公开(公告)日：2016-05-05

    申请号：US14990843

    申请日：2016-01-08

    Applicant: Rohm and Haas Electronic Materials LLC

    Inventor： Egbert Woelk ,  Ronald L. DiCarlo

    IPC: C23C16/455 ,  B01F3/02 ,  B01F15/00 ,  C23C16/448

    CPC classification number: C23C16/45512 ,  B01F3/028 ,  B01F15/00331 ,  C23C16/4481 ,  C23C16/4486 ,  C23C16/45561 ,  C23C16/52 ,  C30B25/14 ,  C30B25/165 ,  C30B29/40 ,  Y10T137/0318 ,  Y10T137/2509

    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

    Abstract translation: 一种方法包括将载气的第一流输送到包含液体前体化合物的输送装置。 该方法还包括将载气的第二流输送到输送装置下游的点。 将从输送装置和第二料流发出的第一料流合并形成第三料流，使得第三料流中的液体前体化合物的蒸汽的露点低于输送蒸气的管道的温度 到CVD反应器或多个CVD反应器。 第一流的流动方向，第二流的流动方向和第三流的流动方向是单向的，并且彼此不相对。

    Vapor Delivery Device, Methods of Manufacture And Methods of Use Thereof
    5.
    发明申请
    Vapor Delivery Device, Methods of Manufacture And Methods of Use Thereof 审中-公开
    蒸气输送装置，制造方法及其使用方法

    公开(公告)号：US20140283917A1

    公开(公告)日：2014-09-25

    申请号：US14299467

    申请日：2014-06-09

    Applicant: Rohm and Haas Electronic Materials LLC

    Inventor： Egbert Woelk ,  Ronald L. DiCarlo, JR.

    IPC: G05D11/13

    CPC classification number: G05D11/138 ,  C23C16/4481 ,  C23C16/45561 ,  C23C16/52 ,  Y10T137/0318 ,  Y10T137/0324 ,  Y10T137/0335 ,  Y10T137/2501 ,  Y10T137/2509 ,  Y10T137/7761

    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

    Abstract translation: 一种方法包括将载气的第一流输送到包含固体前体化合物的递送装置。 载气的第一流处于大于或等于20℃的温度。该方法还包括将载气的第二流输送到输送装置下游的点。 将第一料流和第二料流合并形成第三料流，使得第三料流中的固体前体化合物的蒸气的露点低于环境温度。 第一流的流动方向，第二流的流动方向和第三流的流动方向是单向的，并且彼此不相对。

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