公开(公告)号：US06937694B2

公开(公告)日：2005-08-30

申请号：US10129415

申请日：2002-05-01

申请人： Ryouichi Yokoyama ,  Kazuhiko Omote ,  Kamihisa Endo ,  Ryuji Matsuo

发明人： Ryouichi Yokoyama ,  Kazuhiko Omote ,  Kamihisa Endo ,  Ryuji Matsuo

IPC分类号： G01N23/207

CPC分类号： G01N23/207

摘要： A method for measuring a pole of a sample, using a reflection method, is effective substantially over all measurement regions ranging from the region of high-tilting-angle α of a conventional pole measuring to the in-plane diffraction region corresponding to low-tilting-angle α.

摘要翻译： 使用反射方法测量样品的极点的方法基本上在所有测量范围内有效，所述测量范围从常规极点测量的高倾斜角α的区域到对应于低倾斜度的面内衍射区域 角α。

公开(公告)号：US07003074B2

公开(公告)日：2006-02-21

申请号：US11069447

申请日：2005-02-28

申请人： Ryouichi Yokoyama ,  Kamihisa Endo

发明人： Ryouichi Yokoyama ,  Kamihisa Endo

IPC分类号： G01N23/20 ,  G01D7/02

CPC分类号： G01N23/207 ,  H01L21/31691

摘要： A stress of a c-axis-oriented specimen of a tetragonal polycrystal is measured using X-ray diffraction under the assumption of a plane stress state. An X-ray optical system is set in the location of φ=0°, 45° or 90°. An X-ray diffracted at a crystal plane (the direction of the normal thereto is the direction of an angle of ψ) with the Miller indices (hkl) is detected. A diffraction angle θ in a strain state is measured in the vicinity of a Bragg's angle θ0 in a non-strain state. Strains ε with respect to a plurality of ψ are calculated from the difference between the measurement values θ and the Bragg's angle θ0. Specific stress calculation formulae are determined with respect to the tetragonal system having the Laue symmetry 4/mmm. The stress is calculated from the slope of the linear line of plotted measurement results.

摘要翻译： 在假设平面应力状态下，使用X射线衍射测量四方晶体的c轴取向试样的应力。 X射线光学系统设置在phi = 0°，45°或90°的位置。 检测在米勒指数（hk1）处在晶面（法线方向为角度方向）的X射线衍射的X射线。 在非应变状态下在布拉格角θ0附近测量应变状态下的衍射角θ。 从测量值θ和布拉格角θ0之间的差计算相对于多个psi的菌株ε。 相对于具有Laue对称性4 / mmm的四方晶系确定比应力计算公式。 应力由绘制的测量结果的线性线的斜率计算。

公开(公告)号：US20050190880A1

公开(公告)日：2005-09-01

申请号：US11069447

申请日：2005-02-28

申请人： Ryouichi Yokoyama ,  Kamihisa Endo

发明人： Ryouichi Yokoyama ,  Kamihisa Endo

IPC分类号： G01L1/00 ,  G01B15/06 ,  G01L1/25 ,  G01N23/20 ,  G01N23/207 ,  H01L21/316

CPC分类号： G01N23/207 ,  H01L21/31691

摘要： A stress of a c-axis-oriented specimen of a tetragonal polycrystal is measured using. X-ray diffraction under the assumption of a plane stress state. An X-ray optical system is set in the location of φ=0°, 45° or 90°. An X-ray diffracted at a crystal plane (the direction of the normal thereto is the direction of an angle of ψ) with the Miller indices (hkl) is detected. A diffraction angle θ in a strain state is measured in the vicinity of a Bragg's angle θ0 in a non-strain state. Strains ε with respect to a plurality of ψ are calculated from the difference between the measurement values θ and the Bragg's angle θ0. Specific stress calculation formulae are determined with respect to the tetragonal system having the Laue symmetry 4/mmm. The stress is calculated from the slope of the linear line of plotted measurement results.

摘要翻译： 使用四面体多晶体的c轴取向试样的应力测量。 在假设平面应力状态下的X射线衍射。 X射线光学系统设置在phi = 0°，45°或90°的位置。 检测在米勒指数（hk1）处在晶面（法线方向为角度方向）的X射线衍射的X射线。 在非应变状态下在布拉格角θ0附近测量应变状态下的衍射角θ。 从测量值θ和布拉格角θ0之间的差计算相对于多个psi的菌株ε。 相对于具有Laue对称性4 / mmm的四方晶系确定比应力计算公式。 应力由绘制的测量结果的线性线的斜率计算。

公开(公告)号：US07337098B2

公开(公告)日：2008-02-26

申请号：US10109688

申请日：2002-04-01

申请人： Ryouichi Yokoyama ,  Kamihisa Endo ,  Tetsuya Ozawa ,  Jimpei Harada

发明人： Ryouichi Yokoyama ,  Kamihisa Endo ,  Tetsuya Ozawa ,  Jimpei Harada

IPC分类号： G06G7/48 ,  G01N23/207

CPC分类号： G01N23/20

摘要： A diffraction condition simulation device capable of calculating the UB matrix and the rotation matrix R and also their multiplication RUB, thereby obtaining and displaying any Bragg reflection conditions of any Bragg reflections desired by an operator of said device. The Bragg reflection conditions are useful for structure analysis and structure evaluation of any crystal samples.

摘要翻译： 能够计算UB矩阵和旋转矩阵R以及它们的乘法RUB的衍射条件模拟装置，从而获得并显示所述装置的操作者所期望的任何布拉格反射的任何布拉格反射条件。 布拉格反射条件对于任何晶体样品的结构分析和结构评估是有用的。

公开(公告)号：US06874369B2

公开(公告)日：2005-04-05

申请号：US10650059

申请日：2003-08-27

申请人： Ryouichi Yokoyama ,  Kamihisa Endo

发明人： Ryouichi Yokoyama ,  Kamihisa Endo

IPC分类号： G01L1/00 ,  G01B15/06 ,  G01L1/25 ,  G01N23/20 ,  G01N23/207 ,  H01L21/316 ,  G01D7/02

CPC分类号： G01N23/207 ,  H01L21/31691

摘要： A stress of a c-axis-oriented specimen of a tetragonal polycrystal is measured using X-ray diffraction under the assumption of a plane stress state. An X-ray optical system is set in the location of φ=0°, 45° or 90°. An X-ray diffracted at a crystal plane (the direction of the normal thereto is the direction of an angle of ψ) with the Miller indices (hkl) is detected. A diffraction angle θ in a strain state is measured in the vicinity of a Bragg's angle θ0 in a non-strain state. Strains ε with respect to a plurality of ψ are calculated from the difference between the measurement values θ and the Bragg's angle θ0. Specific stress calculation formulae are determined with respect to the tetragonal system having the Laue symmetry 4/mmm. The stress is calculated from the slope of the linear line of plotted measurement results.

摘要翻译： 在假设平面应力状态下，使用X射线衍射测量四方晶体的c轴取向试样的应力。 X射线光学系统设置在phi = 0°，45°或90°的位置。 检测在米勒指数（hk1）处在晶面（法线方向为角度方向）的X射线衍射的X射线。 在非应变状态下在布拉格角θ0附近测量应变状态下的衍射角θ。 从测量值θ和布拉格角θ0之间的差计算相对于多个psi的菌株ε。 相对于具有Laue对称性4 / mmm的四方晶系确定比应力计算公式。 应力由绘制的测量结果的线性线的斜率计算。