公开(公告)号：US11892428B2

公开(公告)日：2024-02-06

申请号：US17047682

申请日：2018-04-18

Applicant: S.T.JAPAN INC.

Inventor： Takao Nakagawa ,  Norio Yasuda

IPC: G01N27/623 ,  B23K26/0622 ,  B23K26/40 ,  G01N21/63 ,  G01N1/04 ,  G01N1/38 ,  G01N1/28 ,  B23K103/00 ,  G01N21/73

CPC classification number: G01N27/623 ,  B23K26/0624 ,  B23K26/40 ,  G01N1/04 ,  G01N1/286 ,  G01N1/38 ,  G01N21/63 ,  B23K2103/54 ,  G01N21/73 ,  G01N2001/045

Abstract: A laser ablation device is provided with: a laser light source that outputs a femtosecond pulse laser beam; an optical system that includes a first mirror rotatable about a first axis, a second mirror rotatable about a second axis, a first driving source for rotating the first mirror about the first axis, and a second driving source for rotating the second mirror about the second axis, and that reflects the laser beam from the laser light source toward a sample by the first mirror and the second mirror; and an irradiation controller that, on the basis of the two-dimensional coordinate position of an analysis position, controls the first driving source and the second driving source to irradiate the analysis position with the laser beam.