公开(公告)号：US09735379B2

公开(公告)日：2017-08-15

申请号：US14730126

申请日：2015-06-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hyunwoo Joo ,  Sungwoo Ryu ,  Jaewon Shim ,  Whanchae Yong ,  Sukwon Jung ,  Myungsoo Huh

IPC: H01L51/00 ,  C23C4/134 ,  B05B7/00 ,  B05D1/02 ,  H01L27/32 ,  H01L51/52 ,  H01L51/56 ,  C25D5/08

CPC classification number: H01L51/0096 ,  B05B7/00 ,  B05D1/02 ,  C23C4/134 ,  C25D5/08 ,  H01L27/3244 ,  H01L51/003 ,  H01L51/5237 ,  H01L51/56 ,  H01L2227/323 ,  H01L2227/326

Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.

公开(公告)号：US20160208381A1

公开(公告)日：2016-07-21

申请号：US14800652

申请日：2015-07-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seungho Choi ,  Jaewon Shim

IPC: C23C16/455 ,  H01L21/67

CPC classification number: H01L21/67207 ,  C23C16/4401 ,  C23C16/54 ,  H01L21/67126 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67745

Abstract: A thin film encapsulation manufacturing device and a method of manufacturing a thin film encapsulation unit are provided. The thin film encapsulation manufacturing device includes: a first buffer unit configured to load a first substrate and a second substrate; a first cluster connected to the first buffer unit and including a first deposition chamber; and a second cluster connected to the first cluster and including a second deposition chamber, wherein the first substrate and the second substrate are alternately input to the first cluster from the first buffer unit, and a first deposition material is deposited on the first substrate in the first deposition chamber, and the first deposition material is deposited on the second substrate in the second deposition chamber.

Abstract translation: 提供薄膜封装制造装置和制造薄膜封装单元的方法。 薄膜封装制造装置包括：第一缓冲单元，被配置为加载第一基板和第二基板; 连接到第一缓冲单元并包括第一沉积室的第一簇; 以及连接到所述第一簇并且包括第二沉积室的第二簇，其中所述第一基板和所述第二基板从所述第一缓冲单元交替地输入到所述第一簇，并且第一沉积材料沉积在所述第一基板上 第一沉积室，并且第一沉积材料沉积在第二沉积室中的第二基板上。

公开(公告)号：US20160204364A1

公开(公告)日：2016-07-14

申请号：US14730126

申请日：2015-06-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hyunwoo Joo ,  Sungwoo Ryu ,  Jaewon Shim ,  Whanchae Yong ,  Sukwon Jung ,  Myungsoo Huh

IPC: H01L51/00 ,  B05D1/02 ,  H01L51/52 ,  H01L27/32 ,  H01L51/56 ,  B05B7/00 ,  C23C4/134

CPC classification number: H01L51/0096 ,  B05B7/00 ,  B05D1/02 ,  C23C4/134 ,  C25D5/08 ,  H01L27/3244 ,  H01L51/003 ,  H01L51/5237 ,  H01L51/56 ,  H01L2227/323 ,  H01L2227/326

Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.

Abstract translation: 提供一种显示装置及其制造方法。 用于制造显示装置的装置包括：干洗单元，其构造成从母基板的表面去除杂质; 电解质处理单元，连接到所述干洗单元并且被配置为用电解质处理所述母基板的表面; 以及剥离层形成单元，连接到所述电解质处理单元并且被配置为在所述母体基板上形成剥离层。