公开(公告)号：US20170087664A1

公开(公告)日：2017-03-30

申请号：US15175649

申请日：2016-06-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JOO WOAN CHO ,  BYOUNG HO CHEONG ,  OLEG PRUDNIKOV ,  JEONG KYUN NA ,  JOON-HWA BAE ,  SEUNG HWAN LEE ,  BYOUNG KWON CHOO

IPC: B23K26/00 ,  G02B27/28 ,  B23K26/073 ,  G02B5/30 ,  G02B13/02 ,  B23K26/067 ,  G02B27/09 ,  G02B5/04

CPC classification number: B23K26/354 ,  B23K26/067 ,  B23K26/073 ,  G02B5/04 ,  G02B5/3083 ,  G02B13/02 ,  G02B27/0905 ,  G02B27/0955 ,  G02B27/283 ,  G02B27/286 ,  G03F7/70566

Abstract: A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.