公开(公告)号：US20170125246A1

公开(公告)日：2017-05-04

申请号：US15158755

申请日：2016-05-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JOON-HWA BAE ,  BYOUNG KWON CHOO ,  JEONG KYUN NA ,  BYOUNG HO CHEONG ,  JOO WOAN CHO

IPC: H01L21/02 ,  H01L21/308 ,  H01L27/12 ,  H01L21/3105

CPC classification number: H01L21/02675 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02672 ,  H01L21/3086 ,  H01L21/3105 ,  H01L21/32139 ,  H01L27/1281

Abstract: A laser crystallization method includes forming a plurality of first protrusions and depressions on a surface of an amorphous silicon layer, wherein a first protrusion and an adjacent first depression of the plurality of first protrusions and depressions, together, have a first pitch, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US20170087664A1

公开(公告)日：2017-03-30

申请号：US15175649

申请日：2016-06-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JOO WOAN CHO ,  BYOUNG HO CHEONG ,  OLEG PRUDNIKOV ,  JEONG KYUN NA ,  JOON-HWA BAE ,  SEUNG HWAN LEE ,  BYOUNG KWON CHOO

IPC: B23K26/00 ,  G02B27/28 ,  B23K26/073 ,  G02B5/30 ,  G02B13/02 ,  B23K26/067 ,  G02B27/09 ,  G02B5/04

CPC classification number: B23K26/354 ,  B23K26/067 ,  B23K26/073 ,  G02B5/04 ,  G02B5/3083 ,  G02B13/02 ,  G02B27/0905 ,  G02B27/0955 ,  G02B27/283 ,  G02B27/286 ,  G03F7/70566

Abstract: A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.