Semiconductor light emitting device

    公开(公告)号:US11646398B2

    公开(公告)日:2023-05-09

    申请号:US17323042

    申请日:2021-05-18

    Abstract: A semiconductor light emitting device including a semiconductor laminate having first and second surfaces, the semiconductor laminate including first and second conductivity-type semiconductor layers, and an active layer between the semiconductor layers; a partition structure on the first surface, the partition structure having a window defining a light emitting region of the first surface of the semiconductor laminate; a wavelength converter in the window, the wavelength converter being configured to convert a wavelength of light emitted from the active layer; and a first electrode and a second electrode on the second surface of the semiconductor laminate and respectively connected to the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer, wherein the semiconductor laminate includes a plurality of first patterns arranged in the light emitting region of the first surface, and a plurality of second patterns arranged in a covered region of the first surface contacting the partition structure.

    FLUID CONTROL DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

    公开(公告)号:US20240167573A1

    公开(公告)日:2024-05-23

    申请号:US18469222

    申请日:2023-09-18

    Inventor: Byungchul Choi

    CPC classification number: F16K7/126 F16K31/1221

    Abstract: A fluid control device includes: a fluid block having a first channel extending from an inlet to an outlet and a second channel above and in communication with the first channel, the fluid block including a bending cover configured to cover the second channel to thereby block fluid from flowing from the inlet to the outlet of the first channel; and a valve having a hollow portion, a first hole connected to the hollow portion, a piston in the hollow portion, and an elastic body configured to elastically support the piston, the valve configured to pressurize the bending cover, wherein the fluid block includes a guide plate below the bending cover, wherein the fluid block includes a first passage through which control gas flows, and wherein the valve includes a second passage connecting the first passage to the hollow portion.

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