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公开(公告)号:US12111879B2
公开(公告)日:2024-10-08
申请号:US17366180
申请日:2021-07-02
发明人: Hakgyun Kim , Bumsuk Chung
摘要: An operating method for a distribution output device includes; generating data number sets for data groups, grouping defect times according to an order in which the corresponding defects occurred in relation to each of the data number sets, calculating likelihood summations respectively corresponding to the data number sets in relation to defect times grouped in accordance with the data number sets, determining a maximum likelihood summation among the likelihood summations, determining optimal population parameter data for each of the data groups in relation to the maximum likelihood summation, and outputting a Weibull distribution for each of the data groups in relation to the optimal population parameter data for each of the data groups.
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公开(公告)号:US11668743B2
公开(公告)日:2023-06-06
申请号:US17469169
申请日:2021-09-08
发明人: Hakgyun Kim , Bumsuk Chung
CPC分类号: G01R31/2642 , G01R31/2648 , G01R31/2831 , G01R31/2884 , G01R31/2886 , H01L22/34 , H01L2924/00 , H01L2924/0002
摘要: A method of analyzing defects in a semiconductor device includes: collecting current data by applying a test voltage to the semiconductor device; extracting data within a decrease range from the current data; dividing the current data into a first component value and a second component value using the current data and the data extracted from within the decrease range; calculating a first quality index from the first component value satisfying a first function; and calculating a second quality index from the second component value satisfying a second function that is different from the first function.
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