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公开(公告)号：US09086352B2
公开(公告)日：2015-07-21
申请号：US14094256
申请日：2013-12-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Sang-Don Jang , Sang-Wook Park , Oui-Serg Kim , Hi-Kuk Lee , In-Bae Chang
CPC classification number: G01N21/00 , G01N21/9501 , G01N21/956 , G01N2021/0106 , G01N2021/8461
Abstract: A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction.
Abstract translation: 舞台装置包括被配置为在X轴方向和Y轴方向上移动的台架，与X轴方向上与舞台间隔开的X轴干涉反射镜，设置在舞台上的第一X轴干涉仪 其被配置为使用X轴干涉反射器测量所述平台的X轴位置，以及与所述载物台沿Y轴方向隔开的光学可动元件，所述光学可动元件被构造成在X轴方向上移动路径 根据载物台在X轴方向的移动而沿Y轴方向传播的光束。
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公开(公告)号：US09897772B2
公开(公告)日：2018-02-20
申请号：US14563463
申请日：2014-12-08
Applicant: SAMSUNG ELECTRONICS CO., LTD. , SAMSUNG DISPLAY CO., LTD.
Inventor： Sang-Joon Hong , Hi-Kuk Lee , Sang-Don Jang
CPC classification number: G02B7/025 , F16B11/008 , Y10T403/472
Abstract: Disclosed is a fixing module for fixing an optical system to an optical apparatus, including a coupling unit having a plate to couple to the apparatus, the coupling unit having a first penetrating space at a central portion thereof and a protruding portion protruded downwards from the plate; a first fixing unit combinable with the coupling unit and having a receiving space including a thermosetting resin such that the protruding portion is fixed into the thermosetting resin; and a second fixing unit combinable with the first fixing unit and having a second penetrating space communicating with the first penetrating space, such that the optical system can penetrate through the first and the second penetrating spaces and be fixed by the second fixing unit.
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公开(公告)号：US20140268171A1
公开(公告)日：2014-09-18
申请号：US14094256
申请日：2013-12-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Sang-Don Jang , Sang-Wook Park , Oui-Serg Kim , Hi-Kuk Lee , In-Bae Chang
IPC: G01B11/14
CPC classification number: G01N21/00 , G01N21/9501 , G01N21/956 , G01N2021/0106 , G01N2021/8461
Abstract: A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction.
Abstract translation: 舞台装置包括被配置为在X轴方向和Y轴方向上移动的台架，与X轴方向上与舞台间隔开的X轴干涉反射镜，设置在舞台上的第一X轴干涉仪 其被配置为使用X轴干涉反射器测量所述平台的X轴位置，以及与所述载物台沿Y轴方向隔开的光学可动元件，所述光学可动元件被构造成在X轴方向上移动路径 根据载物台在X轴方向的移动而沿Y轴方向传播的光束。
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