公开(公告)号：US09086352B2

公开(公告)日：2015-07-21

申请号：US14094256

申请日：2013-12-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Don Jang ,  Sang-Wook Park ,  Oui-Serg Kim ,  Hi-Kuk Lee ,  In-Bae Chang

IPC: G01B11/02 ,  G01N21/00

CPC classification number: G01N21/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/0106 ,  G01N2021/8461

Abstract: A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction.

Abstract translation: 舞台装置包括被配置为在X轴方向和Y轴方向上移动的台架，与X轴方向上与舞台间隔开的X轴干涉反射镜，设置在舞台上的第一X轴干涉仪 其被配置为使用X轴干涉反射器测量所述平台的X轴位置，以及与所述载物台沿Y轴方向隔开的光学可动元件，所述光学可动元件被构造成在X轴方向上移动路径 根据载物台在X轴方向的移动而沿Y轴方向传播的光束。

公开(公告)号：US09897772B2

公开(公告)日：2018-02-20

申请号：US14563463

申请日：2014-12-08

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Joon Hong ,  Hi-Kuk Lee ,  Sang-Don Jang

IPC: G02B7/02 ,  F16B11/00

CPC classification number: G02B7/025 ,  F16B11/008 ,  Y10T403/472

Abstract: Disclosed is a fixing module for fixing an optical system to an optical apparatus, including a coupling unit having a plate to couple to the apparatus, the coupling unit having a first penetrating space at a central portion thereof and a protruding portion protruded downwards from the plate; a first fixing unit combinable with the coupling unit and having a receiving space including a thermosetting resin such that the protruding portion is fixed into the thermosetting resin; and a second fixing unit combinable with the first fixing unit and having a second penetrating space communicating with the first penetrating space, such that the optical system can penetrate through the first and the second penetrating spaces and be fixed by the second fixing unit.

公开(公告)号：US09329504B2

公开(公告)日：2016-05-03

申请号：US13681068

申请日：2012-11-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Hyun Park ,  Sang-Don Jang ,  Dong-Seok Baek ,  Ki-Hyun Kim ,  Sang-Min Lee ,  Dong-Min Kim

IPC: G03B27/42 ,  G03F9/00 ,  G03B27/32 ,  G03F7/20

CPC classification number: G03F9/7069 ,  G03B27/32 ,  G03B27/42 ,  G03F7/70258 ,  G03F7/70275 ,  G03F7/70791 ,  G03F9/7003 ,  G03F9/7011 ,  G03F9/7015 ,  G03F9/7019 ,  G03F9/7088

Abstract: An origin of a reference coordinate system is assigned to one of a plurality of center points, and center point coordinates according to the reference coordinate system are assigned to remaining center points, so that reference marks successively correspond to center points of a plurality of microscopes fixed to a base. Beam position detection marks disposed between the reference marks with exposure points of exposure heads fixed to the base are crossed to assign beam coordinates according to the reference coordinate system to the exposure points. Thus, alignment may be easily and accurately performed, and is effective for increasingly larger apparatuses.

Abstract translation: 参考坐标系的原点被分配给多个中心点之一，并且根据参考坐标系的中心点坐标被分配给剩余的中心点，使得参考标记连续对应于固定的多个显微镜的中心点 到一个基地 将布置在参考标记与固定到基座的曝光头的曝光点之间的光束位置检测标记交叉，以将根据参考坐标系的光束坐标分配给曝光点。 因此，可以容易且准确地进行对准，并且对于越来越大的装置是有效的。

公开(公告)号：US20140268171A1

公开(公告)日：2014-09-18

申请号：US14094256

申请日：2013-12-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Don Jang ,  Sang-Wook Park ,  Oui-Serg Kim ,  Hi-Kuk Lee ,  In-Bae Chang

IPC: G01B11/14

CPC classification number: G01N21/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/0106 ,  G01N2021/8461

Abstract: A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction.

Abstract translation: 舞台装置包括被配置为在X轴方向和Y轴方向上移动的台架，与X轴方向上与舞台间隔开的X轴干涉反射镜，设置在舞台上的第一X轴干涉仪 其被配置为使用X轴干涉反射器测量所述平台的X轴位置，以及与所述载物台沿Y轴方向隔开的光学可动元件，所述光学可动元件被构造成在X轴方向上移动路径 根据载物台在X轴方向的移动而沿Y轴方向传播的光束。