Semiconductor package with curing layer between semiconductor chips

    公开(公告)号:US11842982B2

    公开(公告)日:2023-12-12

    申请号:US17329230

    申请日:2021-05-25

    IPC分类号: H01L25/065 H01L25/00

    摘要: A semiconductor package includes a lower semiconductor chip having a lower semiconductor substrate and upper pads on a top surface of the lower semiconductor substrate, an upper semiconductor chip stacked on the lower semiconductor chip, the upper semiconductor chip including an upper semiconductor substrate and solder bumps on a bottom surface of the upper semiconductor substrate, and a curing layer between the lower semiconductor chip and the upper semiconductor chip, the curing layer including a first curing layer adjacent to the upper semiconductor chip, the first curing layer including a first photo-curing agent, and a second curing layer between the first curing layer and the top surface of the lower semiconductor substrate, the second curing layer including a first thermo-curing agent.

    Flip chip bonding method
    4.
    发明授权

    公开(公告)号:US10910339B2

    公开(公告)日:2021-02-02

    申请号:US16533450

    申请日:2019-08-06

    IPC分类号: H01L23/00 H01L21/78

    摘要: A flip chip bonding method includes obtaining a die including a first substrate and an adhesive layer on the first substrate; bonding the die to a second substrate different from the first substrate; and curing the adhesive layer. The curing the adhesive layer includes heating the second substrate to melt the adhesive layer, and providing the adhesive layer and the second substrate with air having pressure greater than atmospheric pressure.