公开(公告)号：US12122702B2

公开(公告)日：2024-10-22

申请号：US18094820

申请日：2023-01-09

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Jongha Yun ,  Seyoon Kim ,  Juhui Park ,  Jiyeon Lee ,  Cheolmin Shin

IPC分类号： C02F9/00 ,  B01D15/36 ,  B01D61/02 ,  B01D61/08 ,  B01D61/14 ,  B01D63/02 ,  B08B3/02 ,  B08B3/14 ,  B08B13/00 ,  C02F1/28 ,  C02F1/42 ,  C02F1/44 ,  H01L21/67 ,  C02F103/04 ,  C02F103/34

CPC分类号： C02F9/00 ,  B01D15/361 ,  B01D61/02 ,  B01D61/025 ,  B01D61/026 ,  B01D61/08 ,  B01D61/14 ,  B01D63/02 ,  B08B3/022 ,  B08B3/14 ,  B08B13/00 ,  C02F1/283 ,  C02F1/42 ,  C02F1/441 ,  C02F1/444 ,  H01L21/67017 ,  B01D2313/083 ,  B01D2313/18 ,  B01D2313/60 ,  C02F2103/04 ,  C02F2103/346 ,  C02F2201/005 ,  C02F2209/03 ,  C02F2209/05 ,  C02F2209/40 ,  C02F2301/043 ,  C02F2301/046 ,  H01L21/67063 ,  H01L21/67092

摘要： Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.