SEMICONDUCTOR DEVICE HAVING HIGH VOLTAGE TRANSISTORS

    公开(公告)号:US20210028283A1

    公开(公告)日:2021-01-28

    申请号:US16822389

    申请日:2020-03-18

    IPC分类号: H01L29/10 H01L29/423

    摘要: A semiconductor device includes a gate structure disposed on a substrate. The gate structure has a first sidewall and a second sidewall facing the first sidewall. A first impurity region is disposed within an upper portion of the substrate. The first impurity region is spaced apart from the first sidewall. A third impurity region is within the upper portion of the substrate. The third impurity region is spaced apart from the second sidewall. A first trench is disposed within the substrate between the first sidewall and the first impurity region. The first trench is spaced apart from the first sidewall. A first barrier insulation pattern is disposed within the first trench.