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公开(公告)号:US20170062453A1
公开(公告)日:2017-03-02
申请号:US15348009
申请日:2016-11-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: YUNGHWAN SON , JAESUNG SIM , SHINHWAN KANG , YOUNGWOO PARK , JAEDUK LEE
IPC: H01L27/115
CPC classification number: H01L27/11575 , G11C5/025 , G11C16/0483 , G11C16/30 , H01L27/11517 , H01L27/11526 , H01L27/11548 , H01L27/11551 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11573 , H01L27/11582 , H01L29/34
Abstract: A three-dimensional (3D) semiconductor memory device that includes a peripheral logic structure including peripheral logic circuits disposed on a semiconductor substrate and a first insulation layer overlapping the peripheral logic circuits, and a plurality of memory blocks spaced apart from each other on the peripheral logic structure. At least one of the memory blocks includes a well plate electrode, a semiconductor layer in contact with a first surface of the well plate electrode, a stack structure including a plurality of electrodes vertically stacked on the semiconductor layer, and a plurality of vertical structures penetrating the stack structure and connected to the semiconductor layer.
Abstract translation: 一种三维(3D)半导体存储器件,其包括外围逻辑结构,该外围逻辑结构包括设置在半导体衬底上的外围逻辑电路和与外围逻辑电路重叠的第一绝缘层,以及在周边彼此间隔开的多个存储块 逻辑结构。 存储块中的至少一个包括阱板电极,与阱板电极的第一表面接触的半导体层,包括垂直堆叠在半导体层上的多个电极的堆叠结构,以及多个垂直结构穿透 堆叠结构并连接到半导体层。
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公开(公告)号:US20180076212A1
公开(公告)日:2018-03-15
申请号:US15805513
申请日:2017-11-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: YUNGHWAN SON , JAESUNG SIM , SHINHWAN KANG , YOUNGWOO PARK , JAEDUK LEE
IPC: H01L27/11575 , G11C5/02 , G11C16/04 , G11C16/30 , H01L27/1157 , H01L27/11517
CPC classification number: H01L27/11575 , G11C5/025 , G11C16/0483 , G11C16/30 , H01L27/11517 , H01L27/11526 , H01L27/11548 , H01L27/11551 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11573 , H01L27/11582 , H01L29/34
Abstract: A three-dimensional (3D) semiconductor memory device that includes a peripheral logic structure including peripheral logic circuits disposed on a semiconductor substrate and a first insulation layer overlapping the peripheral logic circuits, and a plurality of memory blocks spaced apart from each other on the peripheral logic structure. At least one of the memory blocks includes a well plate electrode, a semiconductor layer in contact with a first surface of the well plate electrode, a stack structure including a plurality of electrodes vertically stacked on the semiconductor layer, and a plurality of vertical structures penetrating the stack structure and connected to the semiconductor layer.
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