Fabricating calcite nanofluidic channels

    公开(公告)号:US10761428B2

    公开(公告)日:2020-09-01

    申请号:US16114906

    申请日:2018-08-28

    Abstract: A method for fabricating calcite channels in a nanofluidic device is described. A photoresist layer is coated onto a top surface of a silicon nitride (SiN) substrate. After coating the photoresist layer, the photoresist layer is scanned with an electron beam in a predefined pattern. The scanned photoresist is developed to expose portions of the top surface of the SiN substrate in the predefined pattern. Calcite is deposited in the predefined pattern using atomic layer deposition (ALD) using a calcite precursor gas. Using a solvent, a remaining portion of the photoresist layer is removed to expose the deposited calcite in the predefined pattern and on the top surface of the SiN substrate, where a width of the deposited calcite is in range from 50 to 100 nanometers (nm).

    FABRICATING CALCITE NANOFLUIDIC CHANNELS
    9.
    发明申请

    公开(公告)号:US20200071824A1

    公开(公告)日:2020-03-05

    申请号:US16114906

    申请日:2018-08-28

    Abstract: A method for fabricating calcite channels in a nanofluidic device is described. A photoresist layer is coated onto a top surface of a silicon nitride (SiN) substrate. After coating the photoresist layer, the photoresist layer is scanned with an electron beam in a predefined pattern. The scanned photoresist is developed to expose portions of the top surface of the SiN substrate in the predefined pattern. Calcite is deposited in the predefined pattern using atomic layer deposition (ALD) using a calcite precursor gas. Using a solvent, a remaining portion of the photoresist layer is removed to expose the deposited calcite in the predefined pattern and on the top surface of the SiN substrate, where a width of the deposited calcite is in range from 50 to 100 nanometers (nm).

    Detecting carbon dioxide leakage in the field

    公开(公告)号:US11840921B2

    公开(公告)日:2023-12-12

    申请号:US17249461

    申请日:2021-03-02

    CPC classification number: E21B47/113 E21B43/164 B82Y30/00

    Abstract: Methods for fabricating a sensor module for detecting carbon dioxide leakage from a subsurface reservoir are disclosed. The methods include attaching anodic aluminum oxide porous membrane onto a first conductive electrode to form an anodic aluminum oxide template; initiating growth of a plurality of TiO2 nanotubes inside the AAO template using an atomic layer deposition process; removing the anodic aluminum oxide template from the first metal electrode leaving the plurality of TiO2 nanotubes on the first conductive electrode; attaching a second conductive electrode to the plurality of TiO2 nanotubes; connecting the first and the second conductive electrodes with an electric line to form a sensor; providing a rollable sheet of non-conductive material; and attaching a plurality of sensors to the rollable sheet of non-conductive material forming the sensor module.

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