公开(公告)号：US20150188515A1

公开(公告)日：2015-07-02

申请号：US14582606

申请日：2014-12-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA ,  Takashi ITO ,  Keiji NAKAGAWA

IPC: H03H9/24

CPC classification number: G01C19/5607 ,  H03B5/32 ,  H03H9/02102 ,  H03H9/02551 ,  H03H9/0509 ,  H03H9/0547 ,  H03H9/1014 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492 ,  H03H2009/02165

Abstract: A resonator element includes a base portion, and a vibrating arm which extends from the base portion and on which a weight portion is provided, and the weight portion includes a first weight portion which is disposed on one main surface of a distal end portion of the vibrating arm, and a second weight portion which is disposed on the distal end side with respect to the first weight portion and has a thickness smaller than that of the first weight portion. The vibrating arm transmits an energy beam, and a laser incidence area where incidence of the energy beam to the inside of the vibrating arm is allowed, is disposed in a position of the other main surface on the opposite side of the vibrating arm overlapped with the second weight portion.

Abstract translation: 谐振器元件包括基部和从基部延伸并且设置有重物部分的振动臂，并且所述重物部分包括第一重物部分，所述第一重量部分设置在所述第一重量部分的远端部分的一个主表面上 振动臂和相对于第一配重部分设置在远端侧的第二重物部分，其厚度小于第一重量部分的厚度。 振动臂传递能量束，并且允许能量束入射到振动臂内部的激光入射区域设置在与振动臂的相反侧的另一个主表面的重叠的位置 第二重量部分。

公开(公告)号：US20140055206A1

公开(公告)日：2014-02-27

申请号：US14068126

申请日：2013-10-31

Applicant: Seiko Epson Corporation

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA

IPC: H01L41/02 ,  H03B28/00

CPC classification number: H01L41/02 ,  A63F13/08 ,  A63F2300/204 ,  G04F5/06 ,  G06F1/1616 ,  H03B28/00 ,  H03H3/02 ,  H03H9/19 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract translation: 提供了能够改善耐冲击性的谐振元件。 石英晶体振子元件是通过蚀刻相对于石英晶体的晶轴以预定角度切割的Z板形成的谐振器元件。 石英晶体振子元件包括基座，从基座沿Y轴方向延伸的一对谐振臂，以及在X轴方向上开槽基部形成的正X轴槽口和负X轴槽口 。 正X轴槽口通过从X轴的负侧朝向正侧切开基座而形成，使得正X轴槽口的宽度随着接近外圆周而增加。

公开(公告)号：US20150188513A1

公开(公告)日：2015-07-02

申请号：US14582629

申请日：2014-12-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA

IPC: H03H9/21 ,  G01L1/10 ,  H03B5/32

CPC classification number: G01L1/106 ,  H03H9/0547 ,  H03H9/1014 ,  H03H9/215 ,  H03H2003/026

Abstract: A resonator element satisfies, when a shortest distance between a first end portion and a second end portion of a base is Wb [m], an effective width of the base in a Y axis direction is We [m], and a Q value of the resonator element is Q, the following expressions (A) and (B). Q={(ρ·Cp)/(c·α2·Θ)}×[{1+(2·ρ·Cp·We2·f/(π·k))2}/(2·ρ·Cp·We2·f/(π·k))]  (A) 0.81≦Wb/We≦1.70  (B)

Abstract translation: 谐振器元件满足基底的第一端部和第二端部之间的最短距离为Wb [m]时，基板的Y轴方向的有效宽度为We [m]，Q值为 谐振器元件是Q，下面的表达式（A）和（B）。 Q = {（＆rgr;·Cp）/（c·α2·Θ）}×[{1+（2·＆rgr·Cp·We2·f /（＆pgr·k））2} /（2·＆ ·Cp·We2·f /（＆pgr··k））]（A）0.81＆nlE; Wb / We＆nlE; 1.70（B）

公开(公告)号：US20140375178A1

公开(公告)日：2014-12-25

申请号：US14313637

申请日：2014-06-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA

IPC: H03H9/21

CPC classification number: H03H9/21 ,  H03H9/0552 ,  Y10T29/42

Abstract: A resonator element has a base part, vibrating arms having first principal surfaces and second principal surfaces in front-rear relationships with each other and extending from the base part, and side surfaces connected to the first principal surfaces and the second principal surfaces on ends of the vibrating arms, and the side surfaces are slopes having tilts with respect to perpendicular lines of the first principal surfaces or the second principal surfaces and provided from the first principal surfaces to the second principal surfaces, and crystal faces.

Abstract translation: 谐振器元件具有基部，振动臂具有彼此的前后关系的第一主表面和第二主表面，并且从基部延伸，并且连接到第一主表面和第二主表面的第二主表面 振动臂和侧面是相对于第一主表面或第二主表面的垂直线倾斜并且从第一主表面到第二主表面和晶面提供的斜面。

公开(公告)号：US20140375176A1

公开(公告)日：2014-12-25

申请号：US14313486

申请日：2014-06-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA

IPC: H03H9/215 ,  H01L41/047

CPC classification number: H03H9/215 ,  H03H9/0514 ,  H03H9/0552 ,  H03H9/1014

Abstract: A quartz crystal resonator element includes a first electrode pad and a second electrode pad disposed on a lower surface of a support arm, and cut sections disposed in both principal surfaces (upper and lower surfaces) of the support arm between the first and second electrode pads so as to overlap each other, and the cut sections extend so that the support arm is cut from the side surface in the +X-axis direction of the support arm to the −X-axis direction, and are provided with first surfaces roughly perpendicular to the X axis and first and second tilted surfaces extending in the +X-axis direction.

Abstract translation: 石英晶体振子元件包括第一电极焊盘和设置在支撑臂的下表面上的第二电极焊盘，以及设置在第一和第二电极焊盘之间的支撑臂的两个主表面（上表面和下表面）中的切割部分 相互重叠，并且切割部分延伸，使得支撑臂从支撑臂的+ X轴方向的侧表面沿-X轴方向切割，并且设置有大致垂直的第一表面 相对于沿X轴方向延伸的X轴和第一和第二倾斜面。

公开(公告)号：US20170272054A1

公开(公告)日：2017-09-21

申请号：US15615418

申请日：2017-06-06

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA

IPC: H03H9/21

CPC classification number: H03H9/21 ,  H03H9/0542 ,  H03H2003/028 ,  H03H2003/0407

Abstract: A resonator element includes: a base portion including a first end surface that faces a first direction and a second end surface that faces a direction opposite to the first direction, a first vibrating arm that is provided integrally with the base portion and is connected to the first end surface; and a second vibrating arm that is provided integrally with the base portion along the first vibrating arm and is connected to the first end surface. When the shortest distance between the first end surface and the second end surface is Wb and an effective width between the shortest distance Wb and the base portion is We, 0.81≦Wb/We≦1.70 is satisfied.

公开(公告)号：US20160322935A1

公开(公告)日：2016-11-03

申请号：US15136157

申请日：2016-04-22

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA ,  Takayuki KIKUCHI

IPC: H03B5/32 ,  H03H9/09 ,  H03H9/21 ,  H03H9/19

CPC classification number: H03H9/19 ,  G01L1/106 ,  H03B5/32 ,  H03H9/0547 ,  H03H9/21 ,  H03H9/215

Abstract: A vibrator includes a vibrator element and a base on which the vibrator element is installed. In addition, when n is set to a natural number equal to or greater than 2, and j is set to a natural number equal to or greater than 1 and equal to or less than n, the vibrator element includes n inherent vibration modes having resonance frequencies different from each other, and when a resonance frequency of a main vibration of the vibrator element in the n inherent vibration modes is set to ω1 in a relationship between an arbitrary integer kj and a resonance frequency ωj corresponding to each of the n inherent vibration modes, the following three expressions are all satisfied. Δω ≡ ( ∑ j = 2 n  k j  ω j - k 1 - ω 1 ) / ω 1  ω 1  ≥ 0.1   3 ≤ ∑ j = 1 n    k j  ≤ 10

公开(公告)号：US20150188514A1

公开(公告)日：2015-07-02

申请号：US14582712

申请日：2014-12-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Takashi YAMAZAKI ,  Shuhei YOSHIDA ,  Toshinari JOKURA

IPC: H03H9/21 ,  G01L1/10 ,  H03B5/32

CPC classification number: G01L1/106 ,  H03H9/0547 ,  H03H9/1014 ,  H03H9/215 ,  H03H2003/026

Abstract: A resonator element includes: a base portion; a vibrating arm including an arm portion, extending from the base portion, and a wide portion which is connected to a distal end of the arm portion and has a width larger than that of the arm portion; a first driving electrode provided in the vibrating arm; and a weight layer which is provided in the wide portion and has a thickness larger than that of the first driving electrode. The weight layer includes a first weight portion, and a second weight portion which is disposed on the base portion side with respect to the first weight portion and has a fixed-width portion having a width smaller than that of the first weight portion.

Abstract translation: 谐振器元件包括：基部; 振动臂，其包括从所述基部延伸的臂部和与所述臂部的远端连接并且宽度大于所述臂部的宽度的宽部; 设置在所述振动臂中的第一驱动电极; 以及设置在所述宽部分中并且具有比所述第一驱动电极的厚度大的厚度的配重层。 重量层包括第一重量部分和相对于第一重量部分在基部侧设置的第二重量部分，并且具有宽度小于第一重量部分的宽度的固定宽度部分。

公开(公告)号：US20140375177A1

公开(公告)日：2014-12-25

申请号：US14313468

申请日：2014-06-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori YAMADA ,  Shuhei YOSHIDA

IPC: H03H9/21

CPC classification number: H03H9/21 ,  H03H9/0542 ,  H03H2003/028 ,  H03H2003/0407

Abstract: A resonator element includes: a base portion including a first end surface that faces a first direction and a second end surface that faces a direction opposite to the first direction, a first vibrating arm that is provided integrally with the base portion and is connected to the first end surface; and a second vibrating arm that is provided integrally with the base portion along the first vibrating arm and is connected to the first end surface. When the shortest distance between the first end surface and the second end surface is Wb and an effective width between the shortest distance Wb and the base portion is We, 0.81≦Wb/We≦1.70 is satisfied.

Abstract translation: 谐振器元件包括：基部，其包括面向第一方向的第一端面和面向与第一方向相反的方向的第二端面;第一振动臂，与所述基部一体设置并连接到 第一端面; 以及第二振动臂，其与所述基部沿着所述第一振动臂一体设置并且连接到所述第一端面。 当第一端面和第二端面之间的最短距离为Wb且最短距离Wb与基部之间的有效宽度为We时，满足0.81＆nlE; Wb / We＆nlE; 1.70。