公开(公告)号：US20240146103A1

公开(公告)日：2024-05-02

申请号：US18307092

申请日：2023-04-26

Applicant: SEMES CO., LTD.

Inventor： Chan Young Choi ,  Ki Won Han ,  Wan Hee Jeong ,  Kyo Bong Kim ,  Hee Chan Kim ,  Doo Hyun Baek ,  Sang-Oh Kim ,  Hee Jae Byun

IPC: H02J50/00 ,  H01L21/67 ,  H01L21/687 ,  H02J50/10

CPC classification number: H02J50/005 ,  H01L21/67011 ,  H01L21/68707 ,  H02J50/10

Abstract: Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus. The wireless power apparatus includes an outer housing having a main power line forming an induced magnetic field by receiving a power, and a coupling part coupling at least two components among components which are positioned at a periphery of the main power line for fixing the main power line; and an inner housing positioned spaced apart from the outer housing, generating an electromotive force through the induced magnetic field generated from the outer housing, and supplying the electromotive force which is generated to the substrate treating apparatus, and wherein the coupling part is formed of a material at which an eddy current is not generated by the induced magnetic field.