公开(公告)号：US20240146103A1

公开(公告)日：2024-05-02

申请号：US18307092

申请日：2023-04-26

Applicant: SEMES CO., LTD.

Inventor： Chan Young Choi ,  Ki Won Han ,  Wan Hee Jeong ,  Kyo Bong Kim ,  Hee Chan Kim ,  Doo Hyun Baek ,  Sang-Oh Kim ,  Hee Jae Byun

IPC: H02J50/00 ,  H01L21/67 ,  H01L21/687 ,  H02J50/10

CPC classification number: H02J50/005 ,  H01L21/67011 ,  H01L21/68707 ,  H02J50/10

Abstract: Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus. The wireless power apparatus includes an outer housing having a main power line forming an induced magnetic field by receiving a power, and a coupling part coupling at least two components among components which are positioned at a periphery of the main power line for fixing the main power line; and an inner housing positioned spaced apart from the outer housing, generating an electromotive force through the induced magnetic field generated from the outer housing, and supplying the electromotive force which is generated to the substrate treating apparatus, and wherein the coupling part is formed of a material at which an eddy current is not generated by the induced magnetic field.

公开(公告)号：US11702299B2

公开(公告)日：2023-07-18

申请号：US16911779

申请日：2020-06-25

Applicant: SEMES CO., LTD.

Inventor： Sang-Oh Kim ,  Jun Ho Song ,  Myungjin Lee ,  Heejae Byun

IPC: B65G54/02 ,  B65G47/90 ,  H01L21/677 ,  H01L21/67

CPC classification number: B65G54/02 ,  B65G47/905 ,  H01L21/67161 ,  H01L21/67706

Abstract: Provided is a transport robot and a substrate treating apparatus including the transport robot. The substrate treating apparatus includes a transport chamber having a long shape on one side, and for providing a moving space of a substrate, a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process, a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber, a track provided in the transport chamber to provide a moving path of a substrate, and a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.