公开(公告)号：US20160351385A1

公开(公告)日：2016-12-01

申请号：US15165020

申请日：2016-05-26

Applicant: SEMES CO., LTD.

Inventor： DAE MIN KIM ,  SUL LEE ,  BOK KYU LEE ,  JAE MYOUNG LEE

IPC: H01L21/02 ,  B08B15/00 ,  B08B3/14 ,  B08B3/08

CPC classification number: H01L21/67051 ,  B08B2203/0229 ,  C11D11/0047 ,  H01L21/6875

Abstract: An apparatus for treating a substrate includes an injecting member having a first nozzle configured to supply a first chemical to the substrate that is mounted on the supporting unit, and a second nozzle configured to supply a second chemical, which is different from the first chemical, to the substrate that is mounted on the supporting unit, and a controller configured to supply the first chemical before supplying the second chemicals and to control the first chemical, which is variable according to a type of thin film on the substrate mounted on the supporting unit, to be supplied.

Abstract translation: 一种用于处理基板的设备包括：注射构件，其具有构造成将第一化学品供应到安装在支撑单元上的基板的第一喷嘴;以及第二喷嘴，其构造成供应与第一化学品不同的第二化学品， 到安装在支撑单元上的基板，以及控制器，被配置为在供应第二化学品之前提供第一化学品并且控制第一化学品，其根据安装在支撑单元上的基板上的薄膜类型而变化 ，供应。

公开(公告)号：US20170345680A1

公开(公告)日：2017-11-30

申请号：US15607356

申请日：2017-05-26

Applicant: SEMES CO., LTD.

Inventor： YOUNG HUN LEE ,  JAE MYOUNG LEE

IPC: H01L21/67 ,  B08B3/08 ,  B08B3/04 ,  B08B3/14 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/6704 ,  B08B3/041 ,  B08B3/08 ,  B08B3/14 ,  H01L21/67051 ,  H01L21/6719 ,  H01L21/67253 ,  H01L21/67703 ,  H01L21/67742 ,  H01L21/67781 ,  H01L21/68707 ,  H01L21/68764

Abstract: Disclosed are an apparatus and a method for liquid-treating a substrate. An apparatus for treating a substrate includes a liquid treatment chamber that supplies a liquid onto the substrate to liquid-treat the substrate, a drying chamber that removes the remained liquid on the substrate, and a transfer unit that transfers the substrate between the liquid treatment chamber and the drying chamber, wherein the transfer unit includes a hand that supports the substrate, and a weight measuring unit that measures a weight of the remained liquid on the substrate. A weight of a remained liquid on a substrate may be measured by measuring a weight of the substrate while the substrate is transferred.