公开(公告)号：US12138667B2

公开(公告)日：2024-11-12

申请号：US17691215

申请日：2022-03-10

Applicant: SEMES CO., LTD.

Inventor： Shi Hyun Park ,  In Hwang Park ,  Seung Eun Na ,  Eun Woo Jang ,  Kyung Min Kim ,  Je Myung Cha

IPC: H01L21/02 ,  B08B3/08 ,  H01L21/67

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having an inner space therein; a treating container disposed within the inner space and having a treating space; a substrate support unit supporting a substrate in the treating space; a liquid supply unit supplying a liquid to the substrate supported by the substrate support unit; an exhaust unit exhausting a fume generated in the treating space; an airflow supply unit coupled to a top side of the housing and supplying a gas to form a downward airflow to the inner space; and a perforated plate disposed between the treating container and the airflow supply unit and discharging the gas to the inner space, and wherein the perforated plate comprises: a bottom portion and a side portion, the side portion comprising a first side portion, and the first side portion extending and upwardly inclining from the bottom portion to a first sidewall of the housing, and having a first hole for discharging the gas.

公开(公告)号：US20240042493A1

公开(公告)日：2024-02-08

申请号：US18219588

申请日：2023-07-07

Applicant: SEMES CO., LTD.

Inventor： Myung A. JEON ,  Young Seop Choi ,  Young Jin Kim ,  Eun Hyeok Choi ,  Bok Kyu Lee ,  Je Myung Cha ,  Kyu Hwan Chang

IPC: B08B3/02 ,  B08B3/08

CPC classification number: B08B3/022 ,  B08B3/024 ,  B08B3/08

Abstract: A spray unit in which a plurality of nozzle heads are integrally coupled and a substrate treatment apparatus including the spray unit are provided. The substrate treatment apparatus includes: a substrate support unit supporting a substrate and including a spin head, which rotates the substrate; a treatment liquid retrieval unit retrieving substrate treatment liquids used in treating the substrate; and a spray unit including a plurality of nozzle heads and pipes, which are connected to the nozzle heads, and providing the substrate treatment liquids onto the substrate through the nozzle heads and the pipes, wherein the nozzle heads are moved at the same time.