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公开(公告)号:US11892500B2
公开(公告)日:2024-02-06
申请号:US17857978
申请日:2022-07-05
申请人: SEMES CO., LTD.
发明人: Jin Ho Kang , Joo Hyun Seo
IPC分类号: G01P3/48 , G01R31/28 , H01L21/677 , B66B9/00
CPC分类号: G01R31/2867 , B66B9/00 , G01R31/2862 , H01L21/677
摘要: An elevator unit for transferring a tray includes a tray guide block on which a tray is seated, a wrapping connector driving member configured to elevate and lower the tray guide block, a fixed fastener connected to the tray guide block, and a corrective fastener connected to the wrapping connector driving member and configured to rotatably coupled to the fixed fastening member.