公开(公告)号：US20240151670A1

公开(公告)日：2024-05-09

申请号：US18387343

申请日：2023-11-06

Applicant: SEMES CO., LTD.

Inventor： Kiryong LEE

IPC: G01N27/04

CPC classification number: G01N27/041

Abstract: A method of measuring resistance of a specimen including a specimen electrode includes forming a center electrode and an edge electrode in at least a partial region on an upper surface of the specimen, transmitting, by a power supply, current to the specimen electrode, the center electrode, and the edge electrode, measuring, by an ammeter, the current flowing between the specimen electrode and the center electrode, and removing the center electrode and the edge electrode from the upper surface of the specimen.

公开(公告)号：US20230215708A1

公开(公告)日：2023-07-06

申请号：US18148044

申请日：2022-12-29

Applicant: SEMES CO., LTD.

Inventor： Dongchan LEE ,  Jaekyung LEE ,  Jiseok KIM ,  Jehee LEE ,  Kiryong LEE

IPC: H01J37/32

CPC classification number: H01J37/32724 ,  H01J37/32642 ,  H01J2237/2007 ,  H01J2237/002 ,  H01J2237/334 ,  H01L21/6833

Abstract: Provided is a substrate support unit including an electrostatic chuck configured to fix a wafer, an insulating isolation unit, which is arranged below the electrostatic chuck and is configured to insulate the electrostatic chuck, and a ground plate arranged below the insulating isolation unit, wherein the electrostatic chuck, the insulating isolation unit, and the ground plate are spaced apart from each other in a vertical direction, and a lower surface of the electrostatic chuck, a surface of the insulating isolation unit, or a surface of the ground plate has hydrophobicity.