公开(公告)号：US20160351412A1

公开(公告)日：2016-12-01

申请号：US15166562

申请日：2016-05-27

Applicant: SEMES CO., LTD.

Inventor： SEUNGHO LEE ,  MINHEE CHO ,  KI-MOON KANG ,  TAE-KEUN KIM

IPC: H01L21/311 ,  B01D1/00 ,  B01D11/04 ,  C09K13/04 ,  H01L21/67

CPC classification number: H01L21/31111 ,  B01D1/0011 ,  B01D1/0041 ,  B01D1/0082 ,  B01D11/0484 ,  B01D11/0492 ,  C09K13/08 ,  H01L21/67017 ,  H01L21/6708

Abstract: Disclosed is a method of regenerating a phosphoric acid solution from a treatment liquid including silicon (Si), hydrogen fluoride (HF), and phosphoric acid, the method including removing the silicon by supplying hydrogen fluoride corresponding to a preset amount or more to the treatment liquid, removing the hydrogen fluoride by heating the treatment liquid to a boiling point of hydrogen fluoride or higher, and adjusting a temperature and a concentration of the phosphoric acid to preset values.

Abstract translation: 公开了一种从包含硅（Si），氟化氢（HF）和磷酸的处理液中再生磷酸溶液的方法，该方法包括通过向处理中提供相当于预定量或更多的氟化氢来除去硅 液体，通过将处理液加热到氟化氢的沸点以上，通过将磷酸的温度和浓度调整到预先设定的值来除去氟化氢。