公开(公告)号：US20230184574A1

公开(公告)日：2023-06-15

申请号：US18063881

申请日：2022-12-09

Applicant: SEMES CO., LTD.

Inventor： Tae Suk YUN ,  Sang Woo Park ,  Do Gyeong Ha ,  Seung Tae Yang ,  Bu Young Jung ,  Moon Soon Choi ,  Chae Young Lim

IPC: G01F23/02 ,  B05C11/10 ,  B05C5/02

CPC classification number: G01F23/02 ,  B05C11/1026 ,  B05C5/0225

Abstract: Provided is an apparatus for supplying a chemical liquid, the apparatus including: a storage tank in which a chemical liquid is stored; a discharge line through which the chemical liquid stored in the storage tank is discharged; a level tube connected to the storage tank so as to check a water level of the chemical liquid in the storage tank and receiving the chemical liquid at the same water level as the water level of the chemical liquid in the storage tank; and a controller for controlling a first valve installed in the discharge line, in which the level tube has one end connected to an upper space of the storage tank and the other end connected to the discharge line.