公开(公告)号：US20220165589A1

公开(公告)日：2022-05-26

申请号：US17533348

申请日：2021-11-23

Applicant: SEMES CO., LTD.

Inventor： Ki Sang EUM ,  Jin Ho CHOI ,  Byoung Doo CHOI ,  Seung Han LEE ,  Sun Wook JUNG ,  Si Eun KIM

IPC: H01L21/67 ,  C23C16/455 ,  C23C16/44 ,  H01L21/687 ,  H01L21/02

Abstract: An apparatus for treating a substrate, the apparatus comprising: a processing container having an inner space; a support unit having a support plate configured to support and rotate the substrate in the inner space; a liquid supply unit supplying treating liquid to the substrate supported by the support unit; and an exhaust unit exhausting an air flow in the inner space, wherein the processing container includes a bottom wall and a side wall extending from the outside end of the bottom wall, the processing container including a first gas-liquid separator provided at the side wall.

公开(公告)号：US20220139738A1

公开(公告)日：2022-05-05

申请号：US17515737

申请日：2021-11-01

Applicant: SEMES CO., LTD.

Inventor： Jae Oh BANG ,  Young Seo AN ,  Seung Han LEE ,  Seung Hwan LEE ,  Hyun Min KIM

IPC: H01L21/67 ,  H01L21/324 ,  H01L21/66 ,  F27B17/00 ,  F27D7/02 ,  F27D99/00

Abstract: The inventive concept relates to a substrate treating apparatus including a process chamber having a first and a second body, a support unit supporting a substrate, a heating unit heats the substrate, a driver moves any one of the first body and the second body, an interval state detection unit that detects an interval state between a side wall of the first body and a side wall of the second body when the first and the second body are placed in a process location, and a controller that controls the driver and the interval state detection unit, wherein the interval state detection unit includes a pressure provision line that provides a positive pressure or a negative pressure between the side wall of the first body and the side wall of the second body, and a pressure measurement member that measures a change in a pressure of the pressure provision line.