公开(公告)号：US20240222179A1

公开(公告)日：2024-07-04

申请号：US18525387

申请日：2023-11-30

Applicant: SEMES CO., LTD.

Inventor： So Hyung JIONG ,  Hyung Joon KIM ,  Jong Gun LEE

IPC: H01L21/683 ,  C04B35/645 ,  C04B37/02

CPC classification number: H01L21/6833 ,  C04B35/6455 ,  C04B37/021 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/401 ,  C04B2237/402 ,  C04B2237/403 ,  C04B2237/406

Abstract: A method of manufacturing a susceptor includes preparing an electrostatic chuck (ESC) and a base plate, each including a gas channel, preparing a bush-filter assembly disposed between the gas channel in the ESC and the gas channel in the base plate, and coupling the ESC to the base plate in such a manner that a portion of the bush-filter assembly is accommodated in a first accommodation part formed in a surface of the ESC and that a remaining portion of the bush-filter assembly is at least partially accommodated in a second accommodation part formed in a surface of the base plate.