公开(公告)号：US20240153831A1

公开(公告)日：2024-05-09

申请号：US18382042

申请日：2023-10-19

Applicant: SEMES CO., LTD.

Inventor： Yong Jun SEO ,  Su Jin CHAE ,  Sang Hyun SON ,  Sang Min HA ,  Young Sik BANG ,  Jeong Mo HWANG ,  Dong Ok AHN

IPC: H01L21/66 ,  G01F1/684 ,  G01F1/688 ,  G01F1/696

CPC classification number: H01L22/34 ,  G01F1/6845 ,  G01F1/6888 ,  G01F1/6965

Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.

公开(公告)号：US20230204354A1

公开(公告)日：2023-06-29

申请号：US18067406

申请日：2022-12-16

Applicant: SEMES CO., LTD.

Inventor： Su Jin CHAE ,  Sang Min HA ,  Dong Ok AHN ,  Ho Hyeong LEE ,  Yong-Jun SEO ,  Sang Hyun SON ,  Hyeong Jun CHO

IPC: G01C9/04 ,  G01C9/06

CPC classification number: G01C9/04 ,  G01C9/06

Abstract: The inventive concept provides a portable level measuring apparatus. The portable level measuring apparatus includes a sensor module having a sensor unit configured to measure an inclination of a measuring object and a wireless communication unit configured to transmit a measured information which is measured at the sensor unit; and a portable terminal connected to the sensor module through a wireless communication, and which displays the measured information, and wherein the sensor module combines with the portable terminal through a connector and which pairs immediately if separated with the portable terminal.

公开(公告)号：US20230083574A1

公开(公告)日：2023-03-16

申请号：US17737354

申请日：2022-05-05

Applicant: SEMES CO., LTD.

Inventor： Yong Jun SEO ,  Sang Hyun SON ,  Su Jin CHAE ,  Dong Ok AHN

IPC: G01K1/143 ,  H05K1/18

Abstract: A temperature measuring apparatus with improved accuracy is provided. The temperature measuring apparatus comprises a test substrate having a thermal conductivity, a circuit board layer laminated on the test substrate and including a plurality of through holes exposing a top surface of the test substrate, bonding agent disposed in the plurality of through holes and having a thermal conductivity, and a plurality of sensors disposed on the bonding agent and for measuring a temperature.

公开(公告)号：US20230100373A1

公开(公告)日：2023-03-30

申请号：US17956901

申请日：2022-09-30

Applicant: SEMES CO., LTD.

Inventor： Sang Hyun SON ,  Yong-Jun SEO ,  Su Jin CHAE ,  Dong Ok AHN ,  Jae Hong KIM

IPC: H01L21/66 ,  H01L21/67 ,  H01L21/687 ,  H01L21/677

Abstract: The inventive concept provides a sensor station. The sensor station includes a body providing an inner space for storing a substrate-type sensor; a power source unit installed at the body and configured to transmit a power to the substrate-type sensor; a processing unit installed at the body and configured to process a data measured by the substrate-type sensor; and a communication unit installed at the body and configured to exchange a data with the substrate-type sensor and a server of a substrate treating system.