公开(公告)号：US11367635B2

公开(公告)日：2022-06-21

申请号：US16133043

申请日：2018-09-17

Applicant: SEMES CO., LTD.

Inventor： Sangmin Lee ,  Woo Young Kim ,  Joo Jib Park ,  Boong Kim

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/673 ,  H01L21/02

Abstract: Provided are an apparatus and a method for treating a substrate at a high-pressure atmosphere. The apparatus for treating the substrate includes a first body and a second body combined with each other to define a treatment space in which the substrate is treated, a sealing member interposed between the first body and the second body to seal the treatment space from an outside at a position in which the first body is in close contact with the second body, and a driving member to drive the first body or the second body such that the treatment space is open or closed. The sealing member is positioned in a sealing groove formed in the first body. The sealing member is deformed to be in close contact with the second body by pressure of the treatment space when a process is performed.

公开(公告)号：US20190096717A1

公开(公告)日：2019-03-28

申请号：US16133043

申请日：2018-09-17

Applicant: SEMES CO., LTD.

Inventor： Sangmin Lee ,  Woo Young Kim ,  Joo Jib Park ,  Boong Kim

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/673 ,  H01L21/02

Abstract: Provided are an apparatus and a method for treating a substrate at a high-pressure atmosphere. The apparatus for treating the substrate includes a first body and a second body combined with each other to define a treatment space in which the substrate is treated, a sealing member interposed between the first body and the second body to seal the treatment space from an outside at a position in which the first body is in close contact with the second body, and a driving member to drive the first body or the second body such that the treatment space is open or closed. The sealing member is positioned in a sealing groove formed in the first body. The sealing member is deformed to be in close contact with the second body by pressure of the treatment space when a process is performed.

公开(公告)号：US11443938B2

公开(公告)日：2022-09-13

申请号：US16159839

申请日：2018-10-15

Applicant: SEMES CO., LTD.

Inventor： Boong Kim ,  Joo Jib Park ,  Woo Young Kim

IPC: H01L21/67 ,  H01L21/02 ,  B08B7/00 ,  B08B3/08

Abstract: A substrate processing apparatus and a substrate processing method are provided. The substrate processing apparatus includes a chamber having a first housing and a second housing that are combined with each other to form a processing space inside, and a housing actuator that moves the first housing to open or close the processing space. The housing actuator includes a plurality of cylinder units coupled to the first housing, a fluid supplier that supplies a fluid for operating the plurality of cylinder units, and a deviation corrector that corrects an operation deviation between the plurality of cylinder units. The deviation corrector corrects the operation deviation between the plurality of cylinder units coupled to the chamber, thereby minimizing particles that are generated when the chamber is opened/closed.

公开(公告)号：US10197333B2

公开(公告)日：2019-02-05

申请号：US15152979

申请日：2016-05-12

Applicant: Semes Co., Ltd.

Inventor： Boong Kim ,  Min Sung Han ,  Joo Jib Park ,  Woo Young Kim

IPC: F26B21/14 ,  F26B9/06 ,  F26B3/04 ,  F26B21/10 ,  F26B21/12 ,  H01L21/67 ,  H01L21/02

Abstract: Disclosed is a substrate drying apparatus of substrate processing apparatus including a chamber that provides a space for processing a substrate, and a fluid supply unit that supplies a process fluid to the chamber, wherein the liquid supply unit includes a supply tank in which the fluid is stored, a supply line that connects the supply tank and the chamber, a branch line branched from a first point of the supply line and connected to a second point of the supply line, and a temperature control unit that adjusts the temperature of the fluid such that the temperatures of the fluids flowing through the supply line and the branch line between the first point and the second point are different.