公开(公告)号：US20240177975A1

公开(公告)日：2024-05-30

申请号：US18372954

申请日：2023-09-26

申请人： SEMES CO., LTD.

发明人： Yong Jun BAE ,  Seung Pyo LEE ,  Dong Jun PARK ,  Chang Eon PARK ,  Su Won KIM ,  Dho Young KIM

IPC分类号： H01J37/32 ,  F28F3/12

CPC分类号： H01J37/32522 ,  F28F3/12 ,  H01J37/32091 ,  H01J37/3244 ,  H01J37/32513 ,  H01J2237/002

摘要： A cooling plate and a plasma processing chamber are proposed. The cooling plate is configured to allow air to flow throughout the entire region of a window while reducing a region of covering the window. The cooling plate is configured to cool a window configured to seal a plasma processing space at an upper portion, and the cooling plate includes a body having a circular plate shape covering a part of a center region of the window, an inlet through which a gas is introduced into the body, and an outlet through which the gas is discharged from the body to the window. A flow path through which the gas flows and a slope formed from the flow path toward the window are formed between the inlet and the outlet.