公开(公告)号：US11978654B2

公开(公告)日：2024-05-07

申请号：US17082634

申请日：2020-10-28

Applicant: SEMES Co. Ltd.

Inventor： Min Sung Han ,  Wan Jae Park ,  Yoon Jong Ju ,  Jaehoo Lee

IPC: H01L21/687 ,  B25J11/00 ,  B25J15/00 ,  H01J37/32 ,  H01L21/67 ,  H01L21/683 ,  H05B1/02 ,  H05B3/00

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J15/0014 ,  H01J37/32724 ,  H01J37/32733 ,  H01L21/67069 ,  H01L21/67103 ,  H01L21/67115 ,  H01L21/67201 ,  H01L21/6833 ,  H05B1/0233 ,  H05B3/0047 ,  H01J2237/204 ,  H01J2237/334

Abstract: The present invention relates to a substrate processing apparatus capable of shortening a process time, and the substrate processing apparatus according to the present invention comprises an index chamber having a transfer robot loading/unloading a substrate; a process chamber having a heating means heating the substrate and processing the substrate; a loadlock chamber disposed between the index chamber and the process chamber; and a conveying chamber having a conveying robot conveying the substrate between the process chamber and the loadlock chamber, wherein a pre-heating means is provided in the conveying robot to pre-heat the substrate in a state before processing.