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公开(公告)号:US12284834B2
公开(公告)日:2025-04-22
申请号:US18777737
申请日:2024-07-19
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Derrick Johnson , Yupeng Chen , Ralph N. Wall , Mark Griswold
Abstract: In an example, a semiconductor device includes a semiconductor substrate of a first conductivity type and a semiconductor region of the first conductivity type over the semiconductor substrate. A well region of a second conductivity type is in the semiconductor region. A doped region of the first conductivity type is in the well region. A doped region of the second conductivity type is in the well region. A doped region of the second conductivity type is in the semiconductor substrate at a bottom side. A doped region of the first conductivity type is in the semiconductor substrate at the bottom side. A first conductor is at a top side of the semiconductor region and a second conductor is at the bottom side. In some examples, one or more of doped regions at the bottom side is a patterned doped region.
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公开(公告)号:US11056581B2
公开(公告)日:2021-07-06
申请号:US15884779
申请日:2018-01-31
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Mingjiao Liu , Shamsul Arefin Khan , Gordon M. Grivna , Meng-Chia Lee , Ralph N. Wall
IPC: H01L29/739 , H01L29/06 , H01L29/66 , H01L29/423 , H01L29/40
Abstract: In a general aspect, an insulated gate bipolar transistor (IGBT) device can include an active region, an inactive region and a trench extending along a longitudinal axis in the active region. The IGBT device can also include a first mesa defined by a first sidewall of the trench and in parallel with the trench and a second mesa defined by a second sidewall of the trench and in parallel with the trench. The first mesa can include at least one active segment of the IGBT device and the second mesa can include at least one inactive segment of the IGBT device.
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公开(公告)号:US10128330B1
公开(公告)日:2018-11-13
申请号:US15655532
申请日:2017-07-20
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Ralph N. Wall , Meng-Chia Lee
Abstract: A semiconductor device having a novel buried junction architecture. The semiconductor device may have three terminals and a drift region between two of the terminals. The drift region includes an upper drift layer, a lower drift layer, and a buried junction layer between the upper and lower drift layers, wherein the upper and lower drift layers have a first type of doping. The buried junction layer comprises an interspersed pattern of a first material and a second material, the first material having a second type of doping opposite the first type of doping and the second material having the first type of doping and having a different doping concentration than the upper and lower drift layers.
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公开(公告)号:US12087760B2
公开(公告)日:2024-09-10
申请号:US17662263
申请日:2022-05-06
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Derrick Johnson , Yupeng Chen , Ralph N. Wall , Mark Griswold
IPC: H01L27/02 , H01L27/092
CPC classification number: H01L27/0262 , H01L27/0928
Abstract: In an example, a semiconductor device includes a semiconductor substrate of a first conductivity type and a semiconductor region of the first conductivity type over the semiconductor substrate. A well region of a second conductivity type is in the semiconductor region. A doped region of the first conductivity type is in the well region. A doped region of the second conductivity type is in the well region. A doped region of the second conductivity type is in the semiconductor substrate at a bottom side. A doped region of the first conductivity type is in the semiconductor substrate at the bottom side. A first conductor is at a top side of the semiconductor region and a second conductor is at the bottom side. In some examples, one or more of doped regions at the bottom side is a patterned doped region.
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5.
公开(公告)号:US10388726B2
公开(公告)日:2019-08-20
申请号:US15792238
申请日:2017-10-24
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Meng-Chia Lee , Ralph N. Wall
IPC: H01L29/06 , H01L29/08 , H01L29/10 , H01L29/167 , H01L29/40 , H01L29/66 , H01L29/739 , H01L21/265 , H01L21/324
Abstract: Systems and methods herein are directed towards semiconductor devices and methods of manufacture thereof, including the formation of a plurality of passive trenches that act as a single passive trench and may be connected to gate electrodes and/or emitters in various embodiments.
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公开(公告)号:US10546948B1
公开(公告)日:2020-01-28
申请号:US16128267
申请日:2018-09-11
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Meng-Chia Lee , Ralph N. Wall
IPC: E21B49/00 , H01L29/739 , H01L21/265 , H01L29/66 , H01L29/06
Abstract: An electronic device can include a semiconductor substrate having a front side and a back side; an emitter region closer to the front side than to the back side; a trench extending from a back side surface into the semiconductor substrate, wherein the trench has a sidewall and a bottom; a collector region along the back side surface and spaced apart from the bottom of the trench; a field-stop region lying along the bottom and at least a portion of the sidewall of the trench, wherein the emitter and field-stop regions have one conductivity type, and the collector region has the opposite conductivity type; and a collector terminal along the back side and including a metal-containing material, wherein the collector terminal contacts the collector region and is isolated from the field-stop region. A process of forming the electronic device does not require complex or marginal processing operations.
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公开(公告)号:US12166068B2
公开(公告)日:2024-12-10
申请号:US17649299
申请日:2022-01-28
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Ralph N. Wall , Raymond Lappan
Abstract: In an aspect, a process of forming an electronic device can include patterning a substrate to define a trench having a sidewall and forming a first semiconductor layer within the trench and along the sidewall. In an embodiment, the process can further include forming a barrier layer within the trench after forming the first semiconductor layer; forming a second semiconductor layer within the trench after forming the barrier layer, wherein within the trench, first and second portions of the second semiconductor layer contact each other adjacent to a vertical centerline of the trench; and exposing the second semiconductor layer to radiation sufficient to allow a void within second semiconductor layer to migrate toward the barrier layer. In another embodiment, after forming a semiconductor within the trench, the process can further include forming an insulating layer that substantially fills a remaining portion of the trench.
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公开(公告)号:US10727326B2
公开(公告)日:2020-07-28
申请号:US15884773
申请日:2018-01-31
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Meng-Chia Lee , Ralph N. Wall , Mingjiao Liu , Shamsul Arefin Khan , Gordon M. Grivna
IPC: H01L29/739 , H01L29/06 , H01L29/66 , H01L29/423 , H01L29/08 , H01L29/40
Abstract: In a general aspect, an insulated gate bipolar transistor (IGBT) device can include an active region, an inactive region and a trench extending along a longitudinal axis in the active region. The IGBT can also include a first mesa defining a first sidewall of the trench and in parallel with the trench and a second mesa defining a second sidewall of the trench and in parallel with the trench. At least a portion of the first mesa can include an active segment of the IGBT device, and at least a portion of the second mesa can include an inactive segment of the IGBT device.
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公开(公告)号:US11670706B2
公开(公告)日:2023-06-06
申请号:US16947085
申请日:2020-07-17
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Meng-Chia Lee , Ralph N. Wall , Mingjiao Liu , Shamsul Arefin Khan , Gordon M. Grivna
IPC: H01L29/739 , H01L29/06 , H01L29/66 , H01L29/423 , H01L29/08 , H01L29/40
CPC classification number: H01L29/7397 , H01L29/0623 , H01L29/0649 , H01L29/0661 , H01L29/0696 , H01L29/083 , H01L29/401 , H01L29/407 , H01L29/4236 , H01L29/4238 , H01L29/42376 , H01L29/66348
Abstract: In a general aspect, method of producing an insulated-gate bipolar transistor (IGBT) device can include forming a termination structure in an inactive region. The inactive region at least partial surround an active region. The method can also include forming a trench extending along a longitudinal axis in the active region. A first mesa can define a first sidewall of the trench, and a second mesa can define a second sidewall of the trench. The first mesa and the second mesa can be parallel with the trench. The method can further include forming, in at least a portion of the first mesa, an active segment of the IGBT device, and, forming, in at least a portion of the second mesa, an inactive segment of the IGBT device.
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公开(公告)号:US20190058056A1
公开(公告)日:2019-02-21
申请号:US15884779
申请日:2018-01-31
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Mingjiao Liu , Shamsul Arefin Khan , Gordon M. Grivna , Meng-Chia Lee , Ralph N. Wall
IPC: H01L29/739 , H01L29/66 , H01L29/423 , H01L29/06
Abstract: In a general aspect, an insulated gate bipolar transistor (IGBT) device can include an active region, an inactive region and a trench extending along a longitudinal axis in the active region. The IGBT device can also include a first mesa defined by a first sidewall of the trench and in parallel with the trench and a second mesa defined by a second sidewall of the trench and in parallel with the trench. The first mesa can include at least one active segment of the IGBT device and the second mesa can include at least one inactive segment of the IGBT device.
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