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公开(公告)号:US20180323226A1
公开(公告)日:2018-11-08
申请号:US15922514
申请日:2018-03-15
申请人: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
发明人: DEKUI QI , Fucheng Chen
IPC分类号: H01L27/146 , H01L21/28 , H01L21/768 , H01L21/3213
CPC分类号: H01L27/1464 , H01L21/28123 , H01L21/3213 , H01L21/76834 , H01L21/76849 , H01L27/14603 , H01L27/14645
摘要: A semiconductor device includes a device substrate having a dielectric layer and a metal wire in the dielectric layer, a first opening on the metal wire and having a bottom at a depth the same as an upper surface of the metal wire, a first insulation layer including a first color filter material on sidewalls of the first opening, a second opening disposed at opposite ends of the semiconductor device and having a bottom at a depth the same as the depth of the bottom of the first opening, and a second insulation layer including a second color filter material on sidewalls of the second opening. The first opening is for leading out the metal wire to a pad. The second opening is disposed along scribe lines. The semiconductor device simplifies the process of drawing out and isolating the pads and satisfies technical requirements of a back seal ring.