公开(公告)号：US10979013B2

公开(公告)日：2021-04-13

申请号：US16978950

申请日：2019-05-05

Applicant: SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Da Chen ,  Hongfei Wang ,  Peng Wang ,  Xiaojun Zhang ,  Zhongli Li

IPC: H03H9/17 ,  H03H3/02 ,  H01L41/08 ,  H01L41/332 ,  H01L41/314 ,  H01L41/27

Abstract: Disclosed is a method of manufacturing a piezoelectric thin film resonator on a non-silicon substrate, including the following steps: depositing a copper thin film on a silicon wafer; coating photoresist on the copper thin film to perform photoetching so as to remove photoresist in an air gap region under the piezoelectric thin film resonator to be disposed; electroplating-depositing a copper layer, and removing photoresist to obtain a stepped peel sacrifice layer; coating polyimide and performing imidization by heat treatment, making a sandwich structure of the piezoelectric thin film resonator above the polyimide layer; performing etching for the polyimide layer in a region not covered by the piezoelectric thin film resonator by oxygen plasma; placing the obtained device into a copper corrosion solution to dissolve the copper around and under the piezoelectric thin film resonator, attaching a drum coated with polyvinyl alcohol glue onto the piezoelectric thin film resonator, releasing and peeling it from the silicon wafer and then transferring it to a desired non-silicon substrate; washing the drum with hot water to separate the drum from the piezoelectric thin film resonator so as to complete the manufacturing process.

公开(公告)号：US20220120408A1

公开(公告)日：2022-04-21

申请号：US17270074

申请日：2020-03-10

Applicant: Shandong University of Science and Technology

Inventor： Yongping Miao ,  Weihui Liu ,  Da Chen ,  Bing Chen ,  Junying Wei ,  Kun Dai

IPC: F21V5/00 ,  F21V23/00 ,  F21V19/00

Abstract: Disclosed are a switch display apparatus and an assembling method thereof. The apparatus includes a display unit (1), a support unit (2), and a base unit (3) that are arranged sequentially from top to bottom. The display unit (1) includes a display device (4), a combined lens (5), and a display device and combined lens support component (6). The combined lens (5) is located above the display device (4). Both the display device (4) and the combined lens (5) are located inside the display device and combined lens support component (6). The display device and combined lens support component (6) includes a first support part (9) used for providing structural support for the combined lens (5), and a second support part (10) used for providing structural support for the display device (4).

公开(公告)号：US11333318B2

公开(公告)日：2022-05-17

申请号：US17270074

申请日：2020-03-10

Applicant: Shandong University of Science and Technology

Inventor： Yongping Miao ,  Weihui Liu ,  Da Chen ,  Bing Chen ,  Junying Wei ,  Kun Dai

IPC: F21V5/00 ,  F21V19/00 ,  F21V23/00 ,  F21W111/00

Abstract: Disclosed are a switch display apparatus and an assembling method thereof. The apparatus includes a display unit (1), a support unit (2), and a base unit (3) that are arranged sequentially from top to bottom. The display unit (1) includes a display device (4), a combined lens (5), and a display device and combined lens support component (6). The combined lens (5) is located above the display device (4). Both the display device (4) and the combined lens (5) are located inside the display device and combined lens support component (6). The display device and combined lens support component (6) includes a first support part (9) used for providing structural support for the combined lens (5), and a second support part (10) used for providing structural support for the display device (4).