公开(公告)号：US3607110A

公开(公告)日：1971-09-21

申请号：US3607110D

申请日：1968-03-11

Applicant: SIEMENS AG

Inventor： HAAS ERNST ,  MARTIN JOACHIM ,  REUSCHEL KONRAD ,  SCHINK NORBERT ,  VOGEL CARL-HEINZ

IPC: C30B13/00 ,  B01J17/10

CPC classification number: C30B29/06 ,  C30B13/00 ,  Y10S117/90 ,  Y10T117/1076

Abstract: Apparatus comprising means for capturing carbon-containing vapor emanating from carbon-containing substances in the high vacuum environment and in the equipment for producing the high vacuum in the environment, and adsorbent means for adsorbing the carboncontaining vapor.