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公开(公告)号:US20190240848A1
公开(公告)日:2019-08-08
申请号:US16320261
申请日:2017-07-21
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Haruki TAKEUCHI , Takayuki YAMADA , Toru SAEKI , Takumi ONISHI , Hiroyuki UDA , Hisashi GOMI , Toshimitsu FUJI , Hirotsugu SHIRAIWA , Norihiko YAMAMOTO
Abstract: A germ-free glove box includes: a housing in which a germ-free space is formed, the housing including a connector to which a container housing an object is connected; and a glove provided at a front plate of the housing to allow an operating personnel to perform an operation in the germ-free space from the outside of the housing. In this germ-free glove box, the connector is provided on an upper plate of the housing. In the germ-free glove box outside spaces beside the box are effectively utilized, and a large working space is secured at around the bottom surface of a germ-free space.
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公开(公告)号:US20180323086A1
公开(公告)日:2018-11-08
申请号:US15774882
申请日:2016-10-28
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Takashi SHIGETA , Toshihiro KAWAI , Haruki TAKEUCHI , Yoshimasa SUDA , Hisashi GOMI , Shigenori OZAKI
IPC: H01L21/67 , B65G49/07 , B25J5/00 , B25J15/00 , H01L21/687 , H01L21/677
CPC classification number: H01L21/67017 , B25J5/005 , B25J15/00 , B65G49/07 , B65G2201/0297 , H01L21/677 , H01L21/68707
Abstract: Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.
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