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公开(公告)号:US20180308731A1
公开(公告)日:2018-10-25
申请号:US15738027
申请日:2016-06-08
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Haruki TAKEUCHI
IPC: H01L21/673 , H01L21/677 , A61L2/20
CPC classification number: H01L21/67373 , A61L2/20 , H01L21/67376 , H01L21/67379 , H01L21/677 , H01L21/67772
Abstract: Reliability in the restriction of the movement of a container is improved.A content moving device 1 includes: a table portion 20 on which a container 50 is placed; and a restricting mechanism 30. A flange 55 of the container 50 is shaped to provide a recessed portion 56a. A restricting mechanism 30 includes: a collar portion 31; a first restricting portion 32 configured to be located in the recessed portion 56a; a second restricting portion 33a provided above the first restricting portion 32 and inward of the collar portion 31; and a second moving mechanism. The second moving mechanism is configured to move the second restricting portion 33a along an extending direction B between a first position, in which the second restricting portion 33a is opposed to the flange 55 of the container 50 in an up-down direction A, and a second position, in which the second restricting portion 33a is opposed to the recessed portion 56a in the up-down direction A without being opposed to the flange 55 in the up-down direction A.
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公开(公告)号:US20180282675A1
公开(公告)日:2018-10-04
申请号:US15766037
申请日:2016-10-04
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Haruki TAKEUCHI , Yoshimasa SUDA
Abstract: A connection mechanism includes two connection parts. Each connection part includes a first flange including a through hole and an attaching portion by which the first flange is attached to a partial wall portion while the through hole faces an opening. The attaching portion includes: a vertical adjuster which adjusts the attaching position of the first flange so that a surface of the first flange, which is opposite to a surface of the first flange facing the partial wall portion, is vertical; and a rotation adjuster which adjusts the attaching position of the first flange about a horizontal axis passing the center of the through hole and extending in the thickness direction. The attaching position of a first flange can be individually adjusted.
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公开(公告)号:US20180323086A1
公开(公告)日:2018-11-08
申请号:US15774882
申请日:2016-10-28
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Takashi SHIGETA , Toshihiro KAWAI , Haruki TAKEUCHI , Yoshimasa SUDA , Hisashi GOMI , Shigenori OZAKI
IPC: H01L21/67 , B65G49/07 , B25J5/00 , B25J15/00 , H01L21/687 , H01L21/677
CPC classification number: H01L21/67017 , B25J5/005 , B25J15/00 , B65G49/07 , B65G2201/0297 , H01L21/677 , H01L21/68707
Abstract: Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.
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公开(公告)号:US20190240848A1
公开(公告)日:2019-08-08
申请号:US16320261
申请日:2017-07-21
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Haruki TAKEUCHI , Takayuki YAMADA , Toru SAEKI , Takumi ONISHI , Hiroyuki UDA , Hisashi GOMI , Toshimitsu FUJI , Hirotsugu SHIRAIWA , Norihiko YAMAMOTO
Abstract: A germ-free glove box includes: a housing in which a germ-free space is formed, the housing including a connector to which a container housing an object is connected; and a glove provided at a front plate of the housing to allow an operating personnel to perform an operation in the germ-free space from the outside of the housing. In this germ-free glove box, the connector is provided on an upper plate of the housing. In the germ-free glove box outside spaces beside the box are effectively utilized, and a large working space is secured at around the bottom surface of a germ-free space.
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公开(公告)号:US20180169284A1
公开(公告)日:2018-06-21
申请号:US15737609
申请日:2016-06-07
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor: Takayuki YAMADA , Haruki TAKEUCHI
CPC classification number: A61L2/208 , A61L2/20 , A61L2/24 , A61L2202/11 , A61L2202/14 , B01J4/00 , C10L3/00
Abstract: Even when power supply to a gas supply target device is stopped and then resumed, the state of gas supply to a chamber is grasped and a process is performed in accordance with the state. The gas supply target device includes a retaining unit 12 which is able to selectively take one of three states A to C each indicating a state of gas supply to the chamber 10a and is able to maintain, when power supply to the gas supply target device is stopped, one of the states at stop of the power supply, when power supply to the gas supply target device is stopped and then resumed, in which one of the states A to C the retaining unit 12 is set is determined, and a process is performed in accordance with the state of the gas supply to the chamber 10a.
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