公开(公告)号：US20200168495A1

公开(公告)日：2020-05-28

申请号：US16774758

申请日：2020-01-28

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro KAWAI ,  Yasushi TANIYAMA ,  Munekazu KOMIYA ,  Tkashi SHIGETA

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

Abstract: Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base which constitutes a part of a wall isolating a conveyance space from an external space, an opening portion provided in the base; a door which is capable of opening and closing the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door, a sealed space which is constituted by the base, the first seal member, the second seal member, a lid member, and the door when the container is in a state of contact with the opening portion with the first seal member therebetween, a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit 88 which evacuates the sealed space.

公开(公告)号：US20180204753A1

公开(公告)日：2018-07-19

申请号：US15750379

申请日：2016-07-12

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro KAWAI ,  Yasushi TANIYAMA ,  Munekazu KOMIYA ,  Takashi SHIGETA

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/67

Abstract: A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.

公开(公告)号：US20180323086A1

公开(公告)日：2018-11-08

申请号：US15774882

申请日：2016-10-28

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Takashi SHIGETA ,  Toshihiro KAWAI ,  Haruki TAKEUCHI ,  Yoshimasa SUDA ,  Hisashi GOMI ,  Shigenori OZAKI

IPC: H01L21/67 ,  B65G49/07 ,  B25J5/00 ,  B25J15/00 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67017 ,  B25J5/005 ,  B25J15/00 ,  B65G49/07 ,  B65G2201/0297 ,  H01L21/677 ,  H01L21/68707

Abstract: Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.

公开(公告)号：US20180254209A1

公开(公告)日：2018-09-06

申请号：US15757560

申请日：2016-08-19

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro KAWAI ,  Yasushi TANIYAMA ,  Munekazu KOMIYA ,  Takashi SHIGETA

IPC: H01L21/673

CPC classification number: H01L21/67389 ,  F16K15/028 ,  F16K15/147 ,  F16K31/1221 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67775

Abstract: There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.