公开(公告)号：US20180282675A1

公开(公告)日：2018-10-04

申请号：US15766037

申请日：2016-10-04

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Haruki TAKEUCHI ,  Yoshimasa SUDA

IPC: C12M1/12 ,  C12M1/00

Abstract: A connection mechanism includes two connection parts. Each connection part includes a first flange including a through hole and an attaching portion by which the first flange is attached to a partial wall portion while the through hole faces an opening. The attaching portion includes: a vertical adjuster which adjusts the attaching position of the first flange so that a surface of the first flange, which is opposite to a surface of the first flange facing the partial wall portion, is vertical; and a rotation adjuster which adjusts the attaching position of the first flange about a horizontal axis passing the center of the through hole and extending in the thickness direction. The attaching position of a first flange can be individually adjusted.

公开(公告)号：US20180323086A1

公开(公告)日：2018-11-08

申请号：US15774882

申请日：2016-10-28

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Takashi SHIGETA ,  Toshihiro KAWAI ,  Haruki TAKEUCHI ,  Yoshimasa SUDA ,  Hisashi GOMI ,  Shigenori OZAKI

IPC: H01L21/67 ,  B65G49/07 ,  B25J5/00 ,  B25J15/00 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67017 ,  B25J5/005 ,  B25J15/00 ,  B65G49/07 ,  B65G2201/0297 ,  H01L21/677 ,  H01L21/68707

Abstract: Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.