Abstract:
A non-contact power supply device is used in a processing apparatus including a moving unit movable inside a closed container. The device supplies electric power to the moving unit from outside the closed container. The power supply device includes a feed unit and a heat dissipater. The feed unit includes a feed line and a power supply transformer. The feed line has a feed region arranged inside the closed container along the moving direction of the moving unit. The transformer is arranged inside the closed container so as to be opposed to the feed region in a non-contact manner and is provided so as to move together with the moving unit. The heat dissipater includes a portion on one end side connected to the feed region so as to be capable of conducting heat thereto, and a portion on the other end side extending outside the closed container, so that heat generated in the feed region is partially dissipated outside the closed container.
Abstract:
A conveying apparatus includes: a housing; a movable member; a linear motor; and a cover. The linear motor includes a primary magnetic pole and a secondary magnetic pole each having a facing surface that faces the other and that is a plane along the longitudinal direction of the housing. The cover allows the primary magnetic pole to be located in an atmospheric environment, and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the primary magnetic pole and the secondary magnetic pole from each other. The primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated therebetween and acting on their facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall of the housing on which the cover is provided.
Abstract:
A conveying apparatus includes: a housing; a movable member; a linear motor; and a cover. The linear motor includes a primary magnetic pole and a secondary magnetic pole each having a facing surface that faces the other and that is a plane along the longitudinal direction of the housing. The cover allows the primary magnetic pole to be located in an atmospheric environment, and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the primary magnetic pole and the secondary magnetic pole from each other. The primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated therebetween and acting on their facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall of the housing on which the cover is provided.
Abstract:
It is possible to reduce a rise in temperature of a rotor by reducing the temperature of a stator. The motor 1 includes a stator 5, and a rotor 4, which is disposed with a gap from the stator 5, being arranged in a housing 2, in which the stator 5 is provided with an annular yoke and a plurality of teeth protruding from an inner peripheral portion of the yoke toward the rotor 4; slots in which coils 6 wound around the teeth are arranged are respectively formed between the teeth that are adjacent to each other; a mold resin portion 30 in which the stator 5 and the coils 6 are molded is provided; the mold resin portion 30 includes a flow path 32 formed within at least one slot among a plurality of slots; and the flow path 32 is supplied with a cooling medium.
Abstract:
A non-contact power supply device is used in a processing apparatus including a moving unit movable inside a closed container. The device supplies electric power to the moving unit from outside the closed container. The power supply device includes a feed unit and a heat dissipater. The feed unit includes a feed line and a power supply transformer. The feed line has a feed region arranged inside the closed container along the moving direction of the moving unit. The transformer is arranged inside the closed container so as to be opposed to the feed region in a non-contact manner and is provided so as to move together with the moving unit. The heat dissipater includes a portion on one end side connected to the feed region so as to be capable of conducting heat thereto, and a portion on the other end side extending outside the closed container, so that heat generated in the feed region is partially dissipated outside the closed container.
Abstract:
It is possible to reduce a rise in temperature of a rotor by reducing the temperature of a stator. The motor 1 includes a stator 5, and a rotor 4, which is disposed with a gap from the stator 5, being arranged in a housing 2, in which the stator 5 is provided with an annular yoke and a plurality of teeth protruding from an inner peripheral portion of the yoke toward the rotor 4; slots in which coils 6 wound around the teeth are arranged are respectively formed between the teeth that are adjacent to each other; a mold resin portion 30 in which the stator 5 and the coils 6 are molded is provided; the mold resin portion 30 includes a flow path 32 formed within at least one slot among a plurality of slots; and the flow path 32 is supplied with a cooling medium.
Abstract:
To provide a conveying apparatus that includes: a fixed section; a movable section movable with respect to the fixed section; and a pair of linear motors each located so as to be partially included in the fixed section and the movable section. Each linear motor includes a primary magnetic pole section and a secondary magnetic pole section, and these pole sections are arranged to face each other so as to enable the movable section to move with respect to the fixed section. The movable section includes a movable body capable of conveying a conveyed object, and one of the magnetic pole sections of each linear motor. Each linear motor is located at each of opposite ends of the movable body in a width direction that is orthogonal to a moving direction, and the fixed section includes the other of the magnetic pole sections.
Abstract:
To provide a conveying apparatus that includes: a fixed section; a movable section movable with respect to the fixed section; and a pair of linear motors each located so as to be partially included in the fixed section and the movable section. Each linear motor includes a primary magnetic pole section and a secondary magnetic pole section, and these pole sections are arranged to face each other so as to enable the movable section to move with respect to the fixed section. The movable section includes a movable body capable of conveying a conveyed object, and one of the magnetic pole sections of each linear motor. Each linear motor is located at each of opposite ends of the movable body in a width direction that is orthogonal to a moving direction, and the fixed section includes the other of the magnetic pole sections.