MEMORY DEVICE AND METHOD OF MANUFACTURING MEMORY DEVICE

    公开(公告)号:US20240260269A1

    公开(公告)日:2024-08-01

    申请号:US18361509

    申请日:2023-07-28

    Applicant: SK hynix Inc.

    Inventor: Hyun Mi HWANG

    CPC classification number: H10B43/27 H10B41/27 H10B41/35 H10B43/35

    Abstract: There is provided a memory device and a method of manufacturing the memory device. The memory device includes: a wafer including a chip region and an edge region surrounding the chip region; a stack structure including a plurality of insulating layers and a plurality of conductive layers, which are alternately stacked over the chip region; a plurality of channel structures disposed in the stack structure; a first slit penetrating the plurality of insulating layers and the plurality of conductive layers; an upper insulating layer disposed over the edge region; and a plurality of second slits formed in a portion of the upper insulating layer.

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