公开(公告)号：US12080527B2

公开(公告)日：2024-09-03

申请号：US17626244

申请日：2020-07-14

Applicant: SOLERAS ADVANCED COATINGS BV

Inventor： Wilmert De Bosscher ,  Ivan Van De Putte ,  Niek Dewilde

IPC: H01J37/32 ,  C23C14/34 ,  C23C14/35 ,  C23C14/50 ,  H01J37/34

CPC classification number: H01J37/32752 ,  C23C14/3407 ,  C23C14/35 ,  C23C14/50 ,  C23C14/505 ,  H01J37/3405 ,  H01J37/347 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/3323

Abstract: A movement system is provided for moving a non-flat substrate across a sputter flux distribution without circumferentially exposing the non-flat substrate to the sputter flux distribution. The movement system is arranged for a first movement of translationally transporting the non-flat substrate along the sputter flux distribution, and a second movement of translating and/or rotating the non-flat substrate with respect to the sputter flux distribution.