公开(公告)号：US12080527B2

公开(公告)日：2024-09-03

申请号：US17626244

申请日：2020-07-14

Applicant: SOLERAS ADVANCED COATINGS BV

Inventor： Wilmert De Bosscher ,  Ivan Van De Putte ,  Niek Dewilde

IPC: H01J37/32 ,  C23C14/34 ,  C23C14/35 ,  C23C14/50 ,  H01J37/34

CPC classification number: H01J37/32752 ,  C23C14/3407 ,  C23C14/35 ,  C23C14/50 ,  C23C14/505 ,  H01J37/3405 ,  H01J37/347 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/3323

Abstract: A movement system is provided for moving a non-flat substrate across a sputter flux distribution without circumferentially exposing the non-flat substrate to the sputter flux distribution. The movement system is arranged for a first movement of translationally transporting the non-flat substrate along the sputter flux distribution, and a second movement of translating and/or rotating the non-flat substrate with respect to the sputter flux distribution.

公开(公告)号：US11549174B2

公开(公告)日：2023-01-10

申请号：US16954934

申请日：2018-12-11

Applicant: SOLERAS ADVANCED COATINGS BV

Inventor： Wilmert De Bosscher ,  Jörg Oberste Berghaus

IPC: C23C14/34 ,  C23C4/11 ,  C01G51/00 ,  C23C14/08 ,  H01J37/34 ,  H01M4/04 ,  H01M4/525 ,  H01M10/0525 ,  H01M4/02

Abstract: A sputtering target comprising a top coat including a composition of lithium cobalt oxide LiyCozOx. x is smaller than or equal to y+z, and the lithium cobalt oxide has an X-Ray diffraction pattern with a peak P2 at 44°±0.2° 2-theta. The X-Ray diffraction pattern is measured with an X-Ray diffractometer with CuKα1 radiation.