公开(公告)号：US20240014018A1

公开(公告)日：2024-01-11

申请号：US18372126

申请日：2023-09-24

Applicant: SPTS Technologies Limited

Inventor： Tony WILBY ,  Steve BURGESS ,  Adrian THOMAS ,  Rhonda HYNDMAN ,  Scott HAYMORE ,  Clive WIDDICKS ,  Ian MONCRIEFF

IPC: H01J37/34 ,  C23C14/34 ,  C23C14/35 ,  C23C14/18 ,  C23C14/06 ,  C23C14/54

CPC classification number: H01J37/3452 ,  C23C14/3485 ,  C23C14/345 ,  C23C14/351 ,  C23C14/185 ,  C23C14/0641 ,  C23C14/542 ,  H01J37/3467 ,  H01J37/347 ,  H01J2237/3323

Abstract: A magnet assembly is disclosed for steering ions used in the formation of a material layer upon a substrate during a pulsed DC physical vapour deposition process. Apparatus and methods are also disclosed incorporating the assembly for controlling thickness variation in a material layer formed via pulsed DC physical vapour deposition. The magnet assembly comprises a magnetic field generating arrangement for generating a magnetic field proximate the substrate and means for rotating the ion steering magnetic field generating arrangement about an axis of rotation, relative to the substrate. The magnetic field generating arrangement comprises a plurality of magnets configured to an array which extends around the axis of rotation, wherein the array of magnets are configured to generate a varying magnetic field strength along a radial direction relative to the axis of rotation.